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28 Jul 2003

Volume 83, Issue 4, pp. 593-811

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Appl. Phys. Lett. 83, 611 (2003); http://dx.doi.org/10.1063/1.1595724 (3 pages)

Chung-Chih Wu, Chieh-Wei Chen, and Ting-Yi Cho
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On the extraction of positive and negative ions from electron-beam-generated plasmas

S. G. Walton, D. Leonhardt, R. F. Fernsler, and R. A. Meger

Appl. Phys. Lett. 83, 626 (2003); http://dx.doi.org/10.1063/1.1595155 (3 pages) | Cited 8 times

Online Publication Date: 22 July 2003

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The results of investigations using pulsed, electron-beam-produced plasmas in Ar/SF6 mixtures are reported. Positive and negative ions were extracted during the active phase of plasma production using a low-frequency, low-voltage bias applied to the sampling electrode. Time-averaged energy distributions, accumulated over several extraction periods, were employed to investigate the flux of both the positive and negative ions. The extraction of negative ions in large quantities suggests the formation of ion–ion plasmas, and the time-averaged energy distributions are in agreement with estimates of sheath formation at the biased electrode. © 2003 American Institute of Physics.
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52.50.Gj Plasma heating by particle beams
52.40.Kh Plasma sheaths
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