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Applied Physics Letters / Volume 83 / Issue 5 / NANOSCALE SCIENCE AND DESIGN

Appl. Phys. Lett. 83, 990 (2003); http://dx.doi.org/10.1063/1.1592303 (3 pages)

Fabrication and mechanical characterization of ultrashort nanocantilevers

S. G. Nilsson, E.-L. Sarwe, and L. Montelius

Solid State Physics/The Nanometer Consortium, Lund University, P.O. Box 118, SE-221 00 Lund, Sweden

(Received 31 January 2003; accepted 16 May 2003)

Three aspects on nanocantilevers are presented in this letter. First, we present the fabrication process of 2 μm long freestanding chromium cantilevers with width 150 nm, and thickness 50 nm. Second, a measurement scheme using an atomic force microscope operating in contact mode was employed to study the mechanical properties along the length of the cantilevers. Third, we have investigated extremely large deflections on these nanoscale cantilevers demonstrating their high ductility. The spring constants calculated from the experimental data are smaller than expected from classical mechanics calculations, but show good agreement with previously reported calculations for largely deflected beams. © 2003 American Institute of Physics.

© 2003 American Institute of Physics

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KEYWORDS and PACS

Keywords

chromium, nanotechnology, atomic force microscopy, ductility, micromechanics

PACS

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 68.65.-k

    Low-dimensional, mesoscopic, nanoscale and other related systems: structure and nonelectronic properties

  • 81.07.-b

    Nanoscale materials and structures: fabrication and characterization

  • 62.25.-g

    Mechanical properties of nanoscale systems

  • 68.37.Ps

    Atomic force microscopy (AFM)

  • 62.20.F-

    Deformation and plasticity

  • 81.40.Lm

    Deformation, plasticity, and creep

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1592303

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    B. Ilic, D. Czaplewski, M. Zalalutdinov, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Bratt, J. Vac. Sci. Technol. B 19, 2825 (2001)APPLAB000077000020003287000001.

    M. Zalalutdinov, B. Ilic, C. Czaplewski, A. Zehnder, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 77, 3287 (2000)APPLAB000077000020003287000001.

    D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 75, 920 (1999)APPLAB000075000007000920000001.


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