Nitrogen is a commonly observed impurity in natural and synthetic diamond, yet there are still many questions in regard to its incorporation in the material. In all three common forms of diamond: natural, high-pressure high-temperature synthetic, and chemical vapor deposition (CVD) diamond; nitrogen has been observed in substitutional lattice sites. This configuration results in an unpaired electron which gives rise to an easily observed paramagnetic resonance. In addition, aggregate forms of nitrogen, such as A-center (paired nitrogen), B-center, and platelet-related nitrogen are the predominant form of nitrogen observed in natural Type Ia diamonds. These aggregate forms have yet to be observed unambiguously in any form of synthetic diamond. Here, we show evidence, based on quantitative secondary ion mass spectrometry and electron paramagnetic resonance spectroscopy measurements, of nonparamagnetic nitrogen in some CVD diamond films. Further examination of the symmetry-disallowed one-phonon absorption in the infrared spectra of these films indicates the presence of aggregate nitrogen in these materials. © 2003 American Institute of Physics.