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25 Aug 2003

Volume 83, Issue 8, pp. 1497-1679

Issue Cover Spotlight Figure

Appl. Phys. Lett. 83, 1671 (2003); http://dx.doi.org/10.1063/1.1604161 (3 pages)

Wenyi Cai, Christopher F. Powell, Yong Yue, Suresh Narayanan, Jin Wang, Mark W. Tate, Matthew J. Renzi, Alper Ercan, Ernest Fontes, and Sol M. Gruner
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Microfabricated mechanical biosensor with inherently differential readout

C. A. Savran, T. P. Burg, J. Fritz, and S. R. Manalis

Appl. Phys. Lett. 83, 1659 (2003); http://dx.doi.org/10.1063/1.1605238 (3 pages) | Cited 30 times

Online Publication Date: 19 August 2003

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We report measurements with a micromachined mechanical biosensor that inherently suppresses background effects by producing a differential signal with respect to a reference. The sensor comprises two adjacent cantilevers with interdigitated fingers between them that allow interferometric detection of the differential, i.e., relative bending. We demonstrate that differential detection can efficiently suppress unspecific chemical effects that result in cantilever bending. We show that the differential deflection noise is up to an order of magnitude lower than the absolute deflection noise in the low-frequency range of 0.0003–1 Hz, where many types of biologically relevant reactions occur. We also demonstrate the sensor’s applicability to biological receptor–ligand systems by reporting experimental results on direct differential detection of biotin–streptavidin binding. © 2003 American Institute of Physics.
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87.85.Va Micromachining
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
87.15.-v Biomolecules: structure and physical properties
06.60.Vz Workshop procedures (welding, machining, lubrication, bearings, etc.)
07.10.Cm Micromechanical devices and systems
81.20.Wk Machining, milling
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
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