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Applied Physics Letters / Volume 84 / Issue 22 / DEVICE PHYSICS

Appl. Phys. Lett. 84, 4418 (2004); http://dx.doi.org/10.1063/1.1758299 (3 pages)

Electrostatic micromembrane actuator arrays as motion generator

X. T. Wu1, J. Hui1, M. Young1, P. Kayatta2, J. Wong2, D. Kennith2, J. Zhe3, and C. Warde4

1Optron Systems, Inc., 3 Preston Court, Bedford, Massachusetts 01730
2Integrated Micromachines, Inc., 1400 S. Shamrock Avenue, Monrovia, California 91016
3Department of Mechanical Engineering, The University of Akron, Akron, Ohio 44325
4Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02039

(Received 13 November 2003; accepted 5 April 2004; published online 12 May 2004)

A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems (MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10–200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMS mirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated. © 2004 American Institute of Physics.

© 2004 American Institute of Physics

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KEYWORDS and PACS

Keywords

electrostatic actuators, micromirrors, chemical mechanical polishing, scanning electron microscopy, adhesive bonding

PACS

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 42.79.Bh

    Lenses, prisms and mirrors

  • 68.37.Hk

    Scanning electron microscopy (SEM) (including EBIC)

  • 68.35.Np

    Adhesion

  • 81.20.Vj

    Joining; welding

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1758299

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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