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12 Jan 2004

Volume 84, Issue 2, pp. 161-308

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Appl. Phys. Lett. 84, 161 (2004); http://dx.doi.org/10.1063/1.1639505 (3 pages)

Hatice Altug and Jelena Vučković
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Measurement of ion flow in a negative ion source using a Mach probe

A. Tanga, M. Bandyopadhyay, and P. McNeely

Appl. Phys. Lett. 84, 182 (2004); http://dx.doi.org/10.1063/1.1638902 (3 pages) | Cited 9 times

Online Publication Date: 7 January 2004

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Measurements of ion flow in an ion source made for negative ion extraction are reported in this letter. The ion flow has been measured using the Mach probe as two single probes compared with the results as a double probe. The measured values of the Mach number lie between 0.2 and 0.4. The maximum value of the Mach number is observed near the radio-frequency excitation coil. The flow shows a dominant direction toward the extraction grid; however, the flow pattern, away from the central axis of the source, shows a direction reversal and, therefore, convection. The presence of an ion flow has a strong influence on negative ion motion toward the extraction grid and on the sheath potential. The ion flow will play a dominant role in the ion dynamics and negative ion beam overall efficiency. © 2004 American Institute of Physics.
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07.77.Ka Charged-particle beam sources and detectors
52.75.-d Plasma devices

Sensitive measurements of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy

K. Takizawa, K. Sasaki, and A. Kono

Appl. Phys. Lett. 84, 185 (2004); http://dx.doi.org/10.1063/1.1639943 (3 pages) | Cited 15 times

Online Publication Date: 7 January 2004

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Laser-induced fluorescence-dip (LIF-dip) spectroscopy of Ar was used for measuring the distributions of sheath electric fields in low-pressure, inductively-coupled Ar plasmas. A sensitive detection limit of 3 V/cm obtained by LIF-dip allowed the measurement in the presheath region. The distributions of electric fields observed experimentally were compared with those of theoretical calculations based on a simple fluid model. As a result, reasonable agreement between the experiment and the theory was obtained in the electric fields in the sheath region, while the electric fields in the presheath region observed experimentally were higher than the theoretical results. © 2004 American Institute of Physics.
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52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.40.Kh Plasma sheaths
52.65.-y Plasma simulation
52.77.-j Plasma applications

A uniform glow discharge plasma source at atmospheric pressure

Se Youn Moon, W. Choe, and B. K. Kang

Appl. Phys. Lett. 84, 188 (2004); http://dx.doi.org/10.1063/1.1639135 (3 pages) | Cited 62 times

Online Publication Date: 7 January 2004

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An atmospheric-pressure, uniform, continuous, glow plasma was produced in ambient air assisted by argon feeding gas, using a 13.56 MHz rf source. Based on the measured current–voltage curve and optical emission spectrum intensity, the plasma showed typical glow discharge characteristics, free from streamers and arc. The measured rotational and vibrational temperatures were in the range of 490 to 630 K and 2000 to 3300 K, respectively, within the operation range of argon flow rate and rf power. From the spatial measurement of total optical emission intensity, and rotational and vibrational temperatures, the plasma shows very high uniformity (over 93%) in the lengthwise direction. The plasma size for this study was 200 mm×50 mm×5 mm, although a plasma was produced in the scaled-up version of 600 mm in length, aiming for large-area plasma applications. © 2004 American Institute of Physics.
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52.50.Dg Plasma sources
52.80.Hc Glow; corona
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