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Appl. Phys. Lett. 85, 3626 (2004); http://dx.doi.org/10.1063/1.1808885 (3 pages)
Fabrication and characterization of a biologically sensitive field-effect transistor using a nanocrystalline diamond thin film
(Received 17 June 2004; accepted 24 August 2004)
© 2004 American Institute of Physics
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KEYWORDS and PACS
Keywords
diamond, organic compounds, elemental semiconductors, nanostructured materials, semiconductor thin films, field effect transistors, plasma CVD, biomolecular electronics, molecular biophysics
PACS
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Elemental semiconductors
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Nanocrystalline materials
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Field effect devices
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Molecular electronic devices
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Elemental semiconductors
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Polymers; organic compounds
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Structure of nanoscale materials
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Nucleation and growth
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Thin film structure and morphology
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Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
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Biomolecules: structure and physical properties
ARTICLE DATA
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J. Philip, P. Hess, T. Feygelson, J. E. Butler, S. Chattopadhyay, K. H. Chen, and L. C. Chen, J. Appl. Phys. 93, 2164 (2003)JAPIAU000093000004002164000001.
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