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Applied Physics Letters / Volume 85 / Issue 21 / NANOSCALE SCIENCE AND DESIGN

Appl. Phys. Lett. 85, 5034 (2004); http://dx.doi.org/10.1063/1.1818742 (3 pages)

Scanning probe energy loss spectroscopy below 50 nm resolution

F. Festy and R. E. Palmer

Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Birmingham B15 2TT, United Kingdom

(Received 9 February 2004; accepted 24 September 2004)

We report scanning probe energy loss spectroscopy (SPELS) measurements from a roughened Si(111) surface in ultrahigh vacuum. The experiments, which utilize a scanning tunneling microscope tip in the field emission mode as the electron source, establish that the spatial resolution in SPELS is better than 50 nm. The spectral maps acquired indicate different contrast mechanisms for the inelastically scattered and secondary electrons identified in the energy loss spectrum.

© 2004 American Institute of Physics

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KEYWORDS and PACS

Keywords

scanning tunnelling microscopy, electron energy loss spectra, field emission electron microscopy, surface topography measurement, silicon, elemental semiconductors, rough surfaces

PACS

  • 07.79.Cz

    Scanning tunneling microscopes

  • 79.20.Uv

    Electron energy loss spectroscopy

  • 68.37.Ef

    Scanning tunneling microscopy (including chemistry induced with STM)

  • 68.37.Vj

    Field emission and field-ion microscopy

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1818742

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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    J. W. Lyding, S. Skala, J. S. Hubacek, and R. Brockenbrough, Rev. Sci. Instrum. 59, 1897 (1988)RSINAK000059000009001897000001.

    G. F.A. van de Walle, J. W. Gerritsen, H. Van Kempen, and P. Wyder, Rev. Sci. Instrum. 56, 1573 (1985)RSINAK000056000008001573000001.

    R. T. Brockenbrough and J. W. Lyding, Rev. Sci. Instrum. 64, 2225 (1993)RSINAK000064000008002225000001.

    P. Perfetti, S. Nannarone, and A. Savoia, Phys. Rev. B 26, 1125 (1982).

    J. E. Rowe and H. Ibach, Phys. Rev. Lett. 31, 102 (1973).

    J. Stiebling and H. Raether, Phys. Rev. Lett. 40, 1293 (1978).


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