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22 Nov 2004

Volume 85, Issue 21, pp. 4831-5106

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Appl. Phys. Lett. 85, 4845 (2004); http://dx.doi.org/10.1063/1.1823019 (3 pages)

Wounjhang Park and Jeong-Bong Lee
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Microdischarge devices with 10 or 30 μm square silicon cathode cavities: pd scaling and production of the XeO excimer

S.-J. Park, J. G. Eden, J. Chen, and C. Liu

Appl. Phys. Lett. 85, 4869 (2004); http://dx.doi.org/10.1063/1.1825061 (3 pages) | Cited 15 times

Online Publication Date: 23 November 2004

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Silicon microplasma devices with square trench cathode cavities having cross sections of (10 μm)2 or (30 μm)2 and a depth of 200 μm have been fabricated and operated successfully in the rare gases and Xe∕O2 mixtures at pressures (300 K) up to 1100 Torr. The (10 μm)2 structures exhibit electrical characteristics that contrast with the behavior of larger devices and may indicate the onset of the breakdown of pd scaling. Also, a distinct minimum in the ignition voltage of 10 μm square devices is observed for pd≃0.9 Torr cm (p and d are the Ne gas pressure and microcavity cross-sectional dimension, respectively). Strong emission on the 2 1∑+→1 1∑+ transition of XeO in the green (∼510–560 nm) is observed in mixtures of Xe (300–700 Torr) and O2 (1–10 mTorr).
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52.75.-d Plasma devices
52.80.-s Electric discharges
78.55.Ap Elemental semiconductors
72.30.+q High-frequency effects; plasma effects

Low energy electron cooling induced by a magnetic field in high pressure capacitive radio frequency discharges

S. J. You, S. S. Kim, and H. Y. Chang

Appl. Phys. Lett. 85, 4872 (2004); http://dx.doi.org/10.1063/1.1805704 (3 pages) | Cited 10 times

Online Publication Date: 23 November 2004

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A study is conducted on a magnetic field effect on electron heating in capacitive rf discharges under a collisional regime, where the electron mean collision frequency is much higher than the rf frequency. The evolution of an electron energy distribution function (EEDF) over a magnetic field range of 0–30 G in 300 mTorr Ar discharges is measured and calculated for the investigation. A significant change in the low-energy range of the EEDF is found during the evolution. The observed result reveals the application of the magnetic field to the high-pressure capacitive plasma gives rise to a cooling effect on the low-energy electrons. This is in contrast to the low-pressure case where the magnetic field enhances the low-energy electron heating. The calculated result of the EEDF is in good agreement with the experiment.
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52.20.Fs Electron collisions
52.80.Pi High-frequency and RF discharges
52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
52.70.Ds Electric and magnetic measurements

Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide

Yasunori Ohtsu and Hiroharu Fujita

Appl. Phys. Lett. 85, 4875 (2004); http://dx.doi.org/10.1063/1.1827353 (3 pages) | Cited 2 times

Online Publication Date: 23 November 2004

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High-density capacitively coupled radio-frequency plasma with electron density ne>1010 cm−3 was produced using MgO electrodes with a high secondary-electron-emission coefficient. It was found that in the case of MgO electrodes, both plasma density and optical emission intensity were about one order of magnitude higher than those in the case of Al electrodes.
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52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
52.80.Pi High-frequency and RF discharges
52.25.-b Plasma properties
79.20.Hx Electron impact: secondary emission
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