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14 Mar 2005

Volume 86, Issue 11, Articles (11xxxx)

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Appl. Phys. Lett. 86, 113104 (2005); http://dx.doi.org/10.1063/1.1883725 (3 pages)

S. Bhattacharyya, C. Sinturel, J. P. Salvetat, and M.-L. Saboungi
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40 000 pixel arrays of ac-excited silicon microcavity plasma devices

S.-J. Park, K.-F. Chen, N. P. Ostrom, and J. G. Eden

Appl. Phys. Lett. 86, 111501 (2005); http://dx.doi.org/10.1063/1.1880441 (3 pages) | Cited 16 times

Online Publication Date: 8 March 2005

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Arrays of (50 μm)2 Si microcavity plasma devices, as large as 40 000 pixels (200×200) with a packing density of 104 pixels cm−2, have been operated continuously in 500–900 Torr of Ne with ac excitation (5–20 kHz). More than two orders of magnitude larger than previously reported microplasma device arrays, 200×200 pixel structures produce uniform glow discharges in each pixel, have a power consumption of ∼ 0.85 W cm−2 for pNe = 700 Torr and an excitation frequency of 5 kHz, and exhibit maximum radiative efficiency for a Ne pressure of pNe ≅ 700 Torr and an excitation frequency of 10–15 kHz. All arrays examined (10×10→200×200) are characterized by pixel-to-pixel emission intensities constant over the entire array to within ±10%, and no barriers to the successful operation of much larger arrays are apparent.
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52.75.-d Plasma devices
85.60.Pg Display systems
42.79.Kr Display devices, liquid-crystal devices
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