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10 Jan 2005

Volume 86, Issue 2, Articles (02xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 86, 021101 (2005); http://dx.doi.org/10.1063/1.1849439 (3 pages)

H. W. Choi, C. W. Jeon, C. Liu, I. M. Watson, M. D. Dawson, P. R. Edwards, R. W. Martin, S. Tripathy, and S. J. Chua
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Ion energy uniformity in high-frequency capacitive discharges

A. Perret, P. Chabert, J. Jolly, and J.-P. Booth

Appl. Phys. Lett. 86, 021501 (2005); http://dx.doi.org/10.1063/1.1848183 (3 pages) | Cited 20 times

Online Publication Date: 30 December 2004

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Ion energy distribution functions and ion fluxes in low-pressure, high-frequency (13.56–80 MHz) capacitive discharges were investigated both theoretically and experimentally. In most of the conditions explored, the ion energy distribution function was a single peak centered at the time-averaged plasma potential. Lower energy ions with higher fluxes are obtained as the frequency increases. The uniformity of the ion energy across large-area electrodes (40 cm2) was also studied in conditions under which the standing wave effect is important, i.e., conditions such that the rf voltage and the ion flux are strongly nonuniform. Unlike the latter quantities, the ion energy was uniform across the reactor at all frequencies, due to dc current flowing radially in the plasma and in the electrodes.
Show PACS
52.25.Fi Transport properties
52.80.Pi High-frequency and RF discharges
52.65.-y Plasma simulation
52.35.Qz Microinstabilities (ion-acoustic, two-stream, loss-cone, beam-plasma, drift, ion- or electron-cyclotron, etc.)
52.30.-q Plasma dynamics and flow

Collective effects on the symmetric resonant charge transfer in partially ionized hydrogen plasma

Young-Dae Jung

Appl. Phys. Lett. 86, 021502 (2005); http://dx.doi.org/10.1063/1.1848178 (3 pages) | Cited 2 times

Online Publication Date: 3 January 2005

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The collective nonideal effects on the symmetric resonant charge transfer process in the intermediate velocity region are investigated in partially ionized hydrogen plasmas. The effective pseudopotential model taking into account the plasma screening and collective effects is applied to describe the interaction potential in nonideal plasmas. The electron transfer probability and cross section are obtained as functions of the energies of the symmetric and antisymmetric stationary states, nonideality plasma parameter, Debye length, and collision velocity. The results show that the collective effects enhance the symmetric resonant electron transfer probability as well as the electron transfer cross section in nonideal plasmas. It is also found that the collective effects on the symmetric resonant charge transfer process are more significant than the screening effects in nonideal plasmas.
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52.25.Fi Transport properties
52.20.Hv Atomic, molecular, ion, and heavy-particle collisions
52.40.Mj Particle beam interactions in plasmas
52.65.-y Plasma simulation
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