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17 Oct 2005

Volume 87, Issue 16, Articles (16xxxx)

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Appl. Phys. Lett. 87, 161907 (2005); http://dx.doi.org/10.1063/1.2105998 (3 pages)

J. Das, K. B. Kim, F. Baier, W. Löser, and J. Eckert
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Characteristics of surface-wave and volume-wave plasmas produced with internally mounted large-area planar microwave launcher

Masaaki Nagatsu, Katsutoshi Naito, Akihisa Ogino, Keigo Ninomiya, and Shohei Nanko

Appl. Phys. Lett. 87, 161501 (2005); http://dx.doi.org/10.1063/1.2108119 (3 pages) | Cited 4 times

Online Publication Date: 14 October 2005

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We studied discharge characteristics of microwave plasmas excited with a large-area planar microwave launcher installed internally in a 600-mm-diam cylindrical vacuum chamber. With the microwave power less than roughly 400 W, we demonstrated the large volumetric volume-wave plasma (VWP) spread in the entire chamber at a pressure of 14–27 Pa in He. Above 400 W, the plasma discharge made a sudden transition to higher-density, uniform surface-wave plasma (SWP) having a spatial uniformity of ±3.5% over 300 mm in diameter. Electron energy probability functions in the downstream region were studied using Langmuir probe measurements with Druyvesteyn method in both the SWP and VWP discharges.
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52.50.Dg Plasma sources
52.80.Pi High-frequency and RF discharges
52.70.Ds Electric and magnetic measurements
52.25.-b Plasma properties
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