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5 Dec 2005

Volume 87, Issue 23, Articles (23xxxx)

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Appl. Phys. Lett. 87, 234101 (2005); http://dx.doi.org/10.1063/1.2140082 (3 pages)

Ben McMillen, Chuck Jewart, Michael Buric, Kevin P. Chen, Yuankun Lin, and Wei Xu
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Application of a downstream calorimetric probe to reactive plasma

Ing-Shin Chen, Jeffery W. Neuner, Philip S. H. Chen, James J. Welch, and Frank DiMeo

Appl. Phys. Lett. 87, 231501 (2005); http://dx.doi.org/10.1063/1.2140088 (3 pages) | Cited 1 time

Online Publication Date: 1 December 2005

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We explore the application of calorimetric probe located downstream from the plasma zone. By positioning the probe in a downstream location, the probe signal can be correlated with the integral energy flux carried by the effluent species as they propagate downstream from the plasma zone. Because the integral energy flux channeled downstream depends on the plasma conditions, it is possible to infer the plasma conditions from the probe response even though the probe is located away from the plasma zone. A calorimetric probe, based on resistance-temperature detector principle, adequate for fluorine plasma exposure is constructed. Probe operation is demonstrated for NF3–Ar plasmas.
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52.70.Ds Electric and magnetic measurements
52.25.Fi Transport properties
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