APL Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter iResearch App Facebook

BROWSE VOLUMES

Year Range: 
Search Issue | RSS Feeds RSS
Previous Issue Next Issue

8 May 2006

Volume 88, Issue 19, Articles (19xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 88, 193113 (2006); http://dx.doi.org/10.1063/1.2202003 (3 pages)

Fa-Quan He and Ya-Pu Zhao
Enlarge Image | Read More
Return to All Sections
back to top
RSS Feeds

Alkali-halogen plasma generation by dc magnetron discharge

W. Oohara, M. Nakahata, and R. Hatakeyama

Appl. Phys. Lett. 88, 191501 (2006); http://dx.doi.org/10.1063/1.2202723 (3 pages) | Cited 6 times

Online Publication Date: 11 May 2006

Full Text: Read Online (HTML) | Download PDF

Show Abstract
An alkali-halogen plasma is generated by a dc magnetron discharge using thermal cathodes under a uniform magnetic field. Alkali-salt vapor is dissociated and ionized by E×B-drift electron impact, and alkali positive ions and halogen negative ions are produced. A magnetic-filter region is situated at an exit of the discharge region and electrons are removed from the plasma. The electron emission and E/B fields are optimized, resulting in the alkali-halogen plasma with the ion density of 3×108 cm−3 at B = 0.2 T.
Show PACS
52.50.Dg Plasma sources
52.80.Pi High-frequency and RF discharges
52.20.Fs Electron collisions
52.20.Hv Atomic, molecular, ion, and heavy-particle collisions
52.25.Fi Transport properties
52.25.Tx Emission, absorption, and scattering of particles
Return to All Sections
Close

Google Calendar

ADVERTISEMENT

Go to AIP Home   © AIP Publishing LLC
close