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25 Sep 2006

Volume 89, Issue 13, Articles (13xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 89, 131108 (2006); http://dx.doi.org/10.1063/1.2356892 (3 pages)

Paul E. Barclay, Kartik Srinivasan, Oskar Painter, Benjamin Lev, and Hideo Mabuchi
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Correlation between plasma dynamics and porosity of Ge films synthesized by pulsed laser deposition

Daria Riabinina, Mohamed Chaker, and Federico Rosei

Appl. Phys. Lett. 89, 131501 (2006); http://dx.doi.org/10.1063/1.2356689 (3 pages) | Cited 14 times

Online Publication Date: 25 September 2006

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The porosity of Ge films deposited by pulsed laser deposition in an inert gas atmosphere is observed to be directly correlated with the kinetic energy of ablated species. The deposition conditions were modified by varying the pressure and the target-substrate distance. The evolution of the kinetic energy of ablated species as a function of deposition parameters, such as distance from target and background gas pressure, is described in terms of a theoretical model. The relationship between the density of Ge films and the kinetic energy of ablated species is discussed.
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52.77.Dq Plasma-based ion implantation and deposition
81.05.Cy Elemental semiconductors
81.15.Fg Pulsed laser ablation deposition
68.55.A- Nucleation and growth
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.70.Kz Optical (ultraviolet, visible, infrared) measurements

Optogalvanic effect and measurement of gas temperature in an abnormal glow discharge

Bratislav M. Obradović and Milorad M. Kuraica

Appl. Phys. Lett. 89, 131502 (2006); http://dx.doi.org/10.1063/1.2352793 (3 pages) | Cited 1 time

Online Publication Date: 26 September 2006

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Axial distribution of the gas temperature in an abnormal glow discharge in argon is simultaneously determined by laser optogalvanic and absorption spectroscopy methods. Temperature distributions obtained by two different methods are in a fair agreement except in the boundary region between the cathode fall and the negative glow. Systematically lower temperature in this region obtained by optogalvanic spectroscopy is a consequence of the nature of optogalvanic effect, which, in some circumstances, cannot be identified with spectral line profile.
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52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.80.Hc Glow; corona
52.38.Dx Laser light absorption in plasmas (collisional, parametric, etc.)
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.40.Hf Plasma-material interactions; boundary layer effects

Uniform glowlike plasma source assisted by preionization of spark in ambient air at atmospheric pressure

Bing Qi, Chunsheng Ren, Dezhen Wang, Shou-Zhe Li, Kun Wang, and Yutao Zhang

Appl. Phys. Lett. 89, 131503 (2006); http://dx.doi.org/10.1063/1.2356894 (3 pages) | Cited 14 times

Online Publication Date: 27 September 2006

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The ultraviolet radiation produced by spark discharges is employed to supply preionization for the dielectric barrier discharge in ambient air at atmospheric pressure. The effect of ultraviolet preionization and overvoltage on improving the uniformity of the dielectric barrier discharge is investigated experimentally. Based on the emission spectra and voltage-current wave forms, the optical and electrical characteristics of the discharge are discussed.
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52.50.Dg Plasma sources
52.80.Hc Glow; corona
52.80.Mg Arcs; sparks; lightning; atmospheric electricity
52.70.Ds Electric and magnetic measurements
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation

Ultrasonic generation by exciting electric arc: A tool for grain refinement in welding process

Longbiao He, Minsheng Wu, Luming Li, and Hongwei Hao

Appl. Phys. Lett. 89, 131504 (2006); http://dx.doi.org/10.1063/1.2357857 (2 pages) | Cited 5 times

Online Publication Date: 28 September 2006

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Traditional ultrasonic generation ways can not be applied in welding process effectively. This letter introduced a way of ultrasonic generation by exciting electric arc. When electric arc is excited by high frequency current, it generates ultrasonic. Experiments showed that welding arc had broad band response characteristic and the main factor of ultrasonic intensity was the exciting current. With the ultrasonic treatment generated by exciting arc, effect of grain refinement was found in the Ti–6Al–4V welding joint. This method of ultrasonic generation is believed to have an extensive use in material processing.
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81.20.Vj Joining; welding
43.35.Zc

In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3

S. B. S. Heil, P. Kudlacek, E. Langereis, R. Engeln, M. C. M. van de Sanden, and W. M. M. Kessels

Appl. Phys. Lett. 89, 131505 (2006); http://dx.doi.org/10.1063/1.2357886 (3 pages) | Cited 43 times

Online Publication Date: 28 September 2006

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Reaction mechanisms during plasma-assisted atomic layer deposition (ALD) of Al2O3 from Al(CH3)3 and O2 plasma were studied by time-resolved quartz crystal microbalance measurements, mass spectrometry, and optical emission spectroscopy. Al(CH3)3 chemisorption on the oxide surface after the plasma pulse releases CH4 products while from the detection of CO, CO2, and H2O in the O2 plasma it is established that surface –CH3 groups are predominantly removed by O radical-driven combustionlike reactions. Also a second pathway exists for –CH3 removal driven by H2O generated in this plasma step. These reaction pathways are expected to be generic for plasma-assisted ALD of oxides from metal organic precursors.
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52.77.Dq Plasma-based ion implantation and deposition
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
68.55.A- Nucleation and growth
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
82.80.Ms Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI)
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