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16 Oct 2006

Volume 89, Issue 16, Articles (16xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 89, 164101 (2006); http://dx.doi.org/10.1063/1.2362602 (3 pages)

Yen-Wen Lu and Chang-Jin(CJ) Kim
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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

S. V. Singh, P. Kempkes, and H. Soltwisch

Appl. Phys. Lett. 89, 161501 (2006); http://dx.doi.org/10.1063/1.2362599 (3 pages) | Cited 13 times

Online Publication Date: 16 October 2006

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The electron energy distribution function (EEDF) in the E to H mode transition region of an inductively coupled argon discharge has been studied experimentally. The EEDF, which has a Maxwellian- or Druyvesteyn-like shape (depending on pressure) in both “pure” modes, shows a trend to a bi-Maxwellian shape in the vicinity of both the E to H and the H to E mode transitions. Moreover, the normalized electron energy probability functions closely before the E to H and the reverse H to E mode jumps are almost identical, indicating a similar power coupling at both transition points.
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52.80.Pi High-frequency and RF discharges
52.50.Dg Plasma sources
52.70.Ds Electric and magnetic measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation

Characteristics of radio-frequency, atmospheric-pressure glow discharges with air using bare metal electrodes

Hua-Bo Wang, Wen-Ting Sun, He-Ping Li, Cheng-Yu Bao, and Xiao-Zhang Zhang

Appl. Phys. Lett. 89, 161502 (2006); http://dx.doi.org/10.1063/1.2363040 (3 pages) | Cited 5 times

Online Publication Date: 16 October 2006

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In this letter, an induced gas discharge approach is proposed and described in detail for obtaining a uniform atmospheric-pressure glow discharge with air in a γ mode using water-cooled, bare metal electrodes driven by radio-frequency (13.56 MHz) power supply. A preliminary study on the discharge characteristics of the air glow discharge is also presented in this study. With this induced gas discharge approach, radio-frequency, atmospheric-pressure glow discharges using bare metal electrodes with other gases which cannot be ignited directly as the plasma working gas, such as nitrogen, oxygen, etc., can also be obtained.
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52.80.Hc Glow; corona
52.80.Pi High-frequency and RF discharges
52.50.Dg Plasma sources

Anomalous cross field electron transport in a Hall effect thruster

C. Boniface, L. Garrigues, G. J. M. Hagelaar, J. P. Boeuf, D. Gawron, and S. Mazouffre

Appl. Phys. Lett. 89, 161503 (2006); http://dx.doi.org/10.1063/1.2360182 (3 pages) | Cited 15 times

Online Publication Date: 19 October 2006

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The origin of anomalous electron transport across the magnetic field in the channel of a Hall effect thruster has been the subject of controversy, and the relative importance of electron-wall collisions and plasma turbulence on anomalous transport is not clear. From comparisons between Fabry-Pérot measurements and hybrid model calculations of the ion velocity profile in a 5 kW Hall effect thruster, we deduce that one and the same mechanism is responsible for anomalous electron transport inside and outside the Hall effect thruster channel. This suggests that the previous assumption that Bohm anomalous conductivity is dominant outside the thruster channel whereas electron-wall conductivity prevails inside the channel is not valid.
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52.25.Fi Transport properties
52.30.Cv Magnetohydrodynamics (including electron magnetohydrodynamics)
52.40.Hf Plasma-material interactions; boundary layer effects
52.35.Ra Plasma turbulence
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.65.Ww Hybrid methods

Discharge characteristics of atmospheric-pressure radio-frequency glow discharges with argon/nitrogen

Hua-Bo Wang, Wen-Ting Sun, He-Ping Li, Cheng-Yu Bao, Xing Gao, and Hui-Ying Luo

Appl. Phys. Lett. 89, 161504 (2006); http://dx.doi.org/10.1063/1.2362631 (3 pages) | Cited 10 times

Online Publication Date: 19 October 2006

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In this letter, atmospheric-pressure glow discharges in γ mode with argon/nitrogen as the plasma-forming gas using water-cooled, bare copper electrodes driven by radio-frequency power supply at 13.56 MHz are achieved. The preliminary studies on the discharge characteristics show that, induced by the α-γ coexisting mode or γ mode discharge of argon, argon-nitrogen mixture with any mixing ratios, even pure nitrogen, can be employed to generate the stable γ mode radio-frequency, atmospheric-pressure glow discharges and the discharge voltage rises with increasing the fraction of nitrogen in the argon-nitrogen mixture for a constant total gas flow rate.
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52.80.Hc Glow; corona
52.80.Pi High-frequency and RF discharges
52.50.Dg Plasma sources

Submicrosecond pulsed atmospheric glow discharges sustained without dielectric barriers at kilohertz frequencies

J. L. Walsh, J. J. Shi, and M. G. Kong

Appl. Phys. Lett. 89, 161505 (2006); http://dx.doi.org/10.1063/1.2361274 (3 pages) | Cited 30 times

Online Publication Date: 19 October 2006

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In this letter, the authors report the experimental observation of a large-volume atmospheric glow discharge sustained without dielectric barriers at 1 kHz. This barrier-free mode of operation is made possible with a submicrosecond pulsed excitation instead of the usual sinusoidal excitation. Its current-voltage characteristics are shown to be very different from conventional atmospheric dielectric barrier discharges, and its generation mechanism is studied with nanosecond resolved optical emission spectroscopy. The pulsed barrier-free atmospheric plasma is shown to produce very intense atomic oxygen emission line at 777 nm, up to one magnitude more intensive than that of a comparable atmospheric dielectric barrier discharge.
Show PACS
52.80.Hc Glow; corona
52.50.Dg Plasma sources
52.25.Fi Transport properties
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation

Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition

S. K. Ahn, S. J. You, and H. Y. Chang

Appl. Phys. Lett. 89, 161506 (2006); http://dx.doi.org/10.1063/1.2363945 (3 pages) | Cited 11 times

Online Publication Date: 20 October 2006

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A modern trend of VHF driven plasma sources in semiconductor processing stimulates a lot of studies concerning the driving frequency effect on plasma parameters in a capacitive discharge. In spite of abundant studies, the validation and application of these results in industrial plasma processing are still questionable because these studies were performed under a fixed rf voltage condition or an assumption of Maxwellian electron energy distribution, while the fixed discharge power condition and non-Maxwellian distribution are typical in industrial plasma processing. To resolve this problem, the authors investigated the driving frequency effect on plasma parameters (electron density and temperature) under the fixed discharge power condition by measuring the electron energy distribution functions, which are the most important factor in chemical reactions during the plasma processing. A remarkable result was observed—as the driving frequency increases, the electron temperature increases and the electron density remains almost constant or decreases, which is opposite to what previous studies have suggested. This result can be tentatively explained as a result of an enhancement of collisional heating in the bulk plasma with driving frequency under the fixed discharge power condition.
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52.80.Pi High-frequency and RF discharges
52.50.Dg Plasma sources
52.25.Fi Transport properties
52.50.Nr Plasma heating by DC fields; ohmic heating, arcs
52.20.Fs Electron collisions
52.20.Hv Atomic, molecular, ion, and heavy-particle collisions
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