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Appl. Phys. Lett. 89, 181108 (2006); doi:10.1063/1.2360236 (3 pages)

Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition

E. Graugnard, D. P. Gaillot, S. N. Dunham, C. W. Neff, T. Yamashita, and C. J. Summers

School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245

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(Received 3 August 2006; accepted 22 August 2006; published online 31 October 2006)

The photonic bands of two-dimensional (2D) triangular lattice photonic crystal Si slab waveguides were statically tuned using low temperature atomic layer deposition (ALD) of TiO2. Angular dependent reflectance measurements of bare and coated devices were well fitted by three-dimensional finite-difference time-domain calculations. The technique not only allows the physics of photonic band effects in 2D photonic crystals to be systematically studied but also demonstrates large static tuning and precise fine-scale control over band frequency and dispersion, with a frequency tuning range of 12% and precision of 0.005% per ALD cycle. Band tuning to achieve zero group velocity is demonstrated.

© 2006 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 42.82.Et

    Waveguides, couplers, and arrays

  • 42.70.Qs

    Photonic bandgap materials

  • 81.15.Gh

    Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)

PUBLICATION DATA

ISSN:

0003-6951 (print)  
1077-3118 (online)

For access to fully linked references, you need to log in.
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