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11 Dec 2006

Volume 89, Issue 24, Articles (24xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 89, 242109 (2006); http://dx.doi.org/10.1063/1.2405843 (3 pages)

Carlo R. da Cunha, Nobuyuki Aoki, Takahiro Morimoto, Yuichi Ochiai, Richard Akis, and David K. Ferry
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Generation of argon-ion mixed silicon plasmas forming argon encapsulated silicon clusters

T. Kaneko, H. Takaya, and R. Hatakeyama

Appl. Phys. Lett. 89, 241501 (2006); http://dx.doi.org/10.1063/1.2404606 (3 pages)

Online Publication Date: 14 December 2006

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An inductively coupled argon (Ar) plasma is superimposed on a silicon (Si) plasma generated by an electron beam gun in order to realize the formation of gas-atom encapsulated Si cage clusters. The Si clusters, which are formed and deposited on a substrate, are analyzed by laser-desorption time-of-flight mass spectrometry and are found to have the mass spectra of not only pure Si cluster (Sin; n = 1–17) but also Si cluster doped with Ar atom (ArSin; n = 10–20) in the case that the large amount of Ar ions is generated in addition to the Si plasma. Together with the analysis of x-ray photoelectron spectroscopy, it is revealed that the Ar atom is included in the Si cluster, forming the structure of endohedral Ar@Sin complexes. Furthermore, the mass spectrum of Ar@Sin indicates the existence of the magic numbered cluster size n = 15, 16 similar to the metal encapsulated Si clusters.
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52.50.Dg Plasma sources
52.77.Dq Plasma-based ion implantation and deposition
81.05.Cy Elemental semiconductors
82.80.Rt Time of flight mass spectrometry
79.60.Bm Clean metal, semiconductor, and insulator surfaces
61.72.uf Ge and Si

Electron-drift detection using directional planar probes in a low-pressure coaxial surface-wave discharge

S. Letout, C. Boisse-Laporte, and L. L. Alves

Appl. Phys. Lett. 89, 241502 (2006); http://dx.doi.org/10.1063/1.2405411 (3 pages) | Cited 2 times

Online Publication Date: 15 December 2006

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Directional planar probes are used to investigate the electron population in low-pressure (10–100 mTorr) coaxial surface-wave (2.45 GHz) discharges, considering the anisotropy possibly induced by a local plasma resonance. Probe characteristics exhibit a significant increase in the electronic current over a wide range of probe potentials, depending on radial position and direction of observation. Such behavior reveals the presence of highly anisotropic electrons. Experimental probe currents were simulated by considering multiple electron populations, with drifting Maxwellian velocity distributions. Results yield axial drift velocities corresponding to energies up to 30 eV for populations of only a few 10−2 below the thermal background density.
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52.70.Ds Electric and magnetic measurements
52.80.Pi High-frequency and RF discharges
52.25.Fi Transport properties

Quantitative determination of the O(math) density via visible cavity-enhanced spectroscopy

Manish Gupta, Thomas Owano, Douglas Baer, and Anthony O’Keefe

Appl. Phys. Lett. 89, 241503 (2006); http://dx.doi.org/10.1063/1.2408655 (3 pages) | Cited 2 times

Online Publication Date: 15 December 2006

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A simple method has been developed to quantitatively measure the ground state oxygen atom, O(math), density. The technique exploits cavity-enhanced spectroscopy to probe the relatively weak O(math)←O(math) transition near 636 nm. O(math) densities of approximately 3.4×1014 at./cm3 were measured in an inductively coupled plasma produced within a high-finesse optical cavity, and a minimum detectable atom state density of 1.3×1012 at./cm3 was determined. The absorption profile yielded a translational temperature of 453 K. The technique can be readily extended to other atomic species.
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52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
07.60.Rd Visible and ultraviolet spectrometers
52.50.Dg Plasma sources
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