APL Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter iResearch App Facebook

BROWSE VOLUMES

Year Range: 
Search Issue | RSS Feeds RSS
Previous Issue

25 Dec 2006

Volume 89, Issue 26, Articles (26xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 89, 263110 (2006); http://dx.doi.org/10.1063/1.2424541 (3 pages)

Ch. Deneke, U. Zschieschang, H. Klauk, and O. G. Schmidt
Enlarge Image | Read More
Return to All Sections
back to top
RSS Feeds

Scaling laws for dielectric window breakdown in vacuum and collisional regimes

Y. Y. Lau, J. P. Verboncoeur, and H. C. Kim

Appl. Phys. Lett. 89, 261501 (2006); http://dx.doi.org/10.1063/1.2425025 (3 pages) | Cited 17 times

Online Publication Date: 29 December 2006

Full Text: Read Online (HTML) | Download PDF

Show Abstract
The scaling laws for the initiation time of radio frequency (rf) window breakdown are constructed for three gases: Ar, Xe, and Ne. They apply to the vacuum, to the multipactor-triggered regime, and to the collisional rf plasma regime, and they are corroborated by computer simulations of these three gases over a wide range of pressures. This work elucidates the key factors that are needed for the prediction of rf window breakdown in complex gases, such as air, at various pressures.
Show PACS
52.80.Vp Discharge in vacuum
52.80.Pi High-frequency and RF discharges
52.20.Fs Electron collisions
52.20.Hv Atomic, molecular, ion, and heavy-particle collisions

Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas

T. Gans, J. Schulze, D. O’Connell, U. Czarnetzki, R. Faulkner, A. R. Ellingboe, and M. M. Turner

Appl. Phys. Lett. 89, 261502 (2006); http://dx.doi.org/10.1063/1.2425044 (3 pages) | Cited 57 times

Online Publication Date: 29 December 2006

Full Text: Read Online (HTML) | Download PDF

Show Abstract
An industrial, confined, dual frequency, capacitively coupled, radio-frequency plasma etch reactor (Exelan®, Lam Research) has been modified for spatially resolved optical measurements. Space and phase resolved optical emission spectroscopy yields insight into the dynamics of the discharge. A strong coupling of the two frequencies is observed in the emission profiles. Consequently, the ionization dynamics, probed through excitation, is determined by both frequencies. The control of plasma density by the high frequency is, therefore, also influenced by the low frequency. Hence, separate control of plasma density and ion energy is rather complex.
Show PACS
52.50.Dg Plasma sources
52.80.Pi High-frequency and RF discharges
52.77.Bn Etching and cleaning
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.25.Jm Ionization of plasmas

Xenon ion beam characterization in a helicon double layer thruster

C. Charles, R. W. Boswell, and M. A. Lieberman

Appl. Phys. Lett. 89, 261503 (2006); http://dx.doi.org/10.1063/1.2426881 (3 pages) | Cited 33 times

Online Publication Date: 29 December 2006

Full Text: Read Online (HTML) | Download PDF

Show Abstract
A current-free electric double layer is created in a helicon double layer thruster operating with xenon and compared to a recently developed theory. The Xe+ ion beam formed by acceleration through the potential drop of the double layer is characterized radially using an electrostatic ion energy analyzer. For operating conditions of 500 W rf power, 0.07 mTorr gas pressure, and a maximum magnetic field of 125 G, the measured beam velocity is about 6 km s−1, the beam area is about 150 cm2, and the measured beam divergence is less than 6°.
Show PACS
52.75.Di Ion and plasma propulsion
52.40.Kh Plasma sheaths
52.40.Mj Particle beam interactions in plasmas
52.70.Nc Particle measurements
Return to All Sections
Close

Google Calendar

ADVERTISEMENT

Go to AIP Home   © AIP Publishing LLC
close