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Applied Physics Letters / Volume 89 / Issue 5 / DEVICE PHYSICS
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Appl. Phys. Lett. 89, 053513 (2006); http://dx.doi.org/10.1063/1.2264092 (2 pages)

Vacuum ion emission from solid electrolytes: An alternative source for focused ion beams

Conrad Escher1, Sandra Thomann1, Cornel Andreoli1, Hans-Werner Fink1, Julien Toquant2, and Dieter W. Pohl2

1Physik Institut der Universität Zürich, Winterhurerstrasse 190, CH-8057 Zürich, Switzerland
2Physik Institut der Universität Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland

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(Received 12 April 2006; accepted 13 June 2006; published online 4 August 2006)

A bright ion source based on the solid electrolyte (AgI)0.5(AgPO3)0.5 has been developed. The solid electrolyte source provides stable currents of Ag+ in the microampere regime that make it suitable for focused ion beam applications. Similar conditions are expected for different solid electrolyte materials and their corresponding ions. This opens a broad field of applications in structuring and modifying devices on a nanometer scale using focused ion beams.

© 2006 American Institute of Physics

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KEYWORDS and PACS

Keywords

ion emission, solid electrolytes, focused ion beam technology, silver compounds

PACS

  • 79.90.+b

    Other topics in electron and ion emission by liquids and solids and impact phenomena (restricted to new topics in section 79)

  • 82.45.Gj

    Electrolytes

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.2264092

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

  1. J. Orloff, M. Utlaut, and L. Swanson, High Resolution Focused Ion Beams: FIB and Applications (Kluwer Academic, Dordrecht/Plenum, New York, 2003).
  2. C. A. Angell, Annu. Rev. Phys. Chem. 43, 693 (1992).
  3. J. P. Malugani, A. Wasniewski, M. Doreau, G. Robert, and A. Al Rikabi, Mater. Res. Bull. 13, 427 (1978). [Inspec] [ISI]
  4. P. Mustarelli, C. Tomasi, and A. Magistris, Phys. Rev. B 63, 144203 (2001).
  5. E. W. Mueller and T. T. Tsong, Field Ion Microscopy: Principles and Applications (Elsevier, New York, 1969).
  6. C. Escher, T. Latychevskaia, H.-W. Fink, and D. W. Pohl, Phys. Rev. Lett. (to be published).
  7. R. C. Agrawal and R. K. Gupta, J. Mater. Sci. 34, 1131 (1999). [Inspec] [ISI]

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Figures (click on thumbnails to view enlargements)

FIG.1
(Color online) Schematic of the solid electrolyte ion source and realizations of it. (a) Principle of the solid electrolyte ion beam source. Different fabrication methods have been explored, ending up with sharply pointed tips. (b) Shaping of a tip by drawing a heated fiber of the solid electrolyte material. (c) Filling the solid electrolyte material into a glass capillary. (d) Evaporating silver onto the glass capillary followed by using a focused ion beam to cut off the very end of the tip. Although this structure is more complicated to fabricate, it has the advantage of the silver reservoir being in immediate contact to the emitting region of the solid electrolyte. The bars in the scanning electron micrographs correspond to 1 μm.

FIG.1 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.2
(Color online) Schematic setup and field ion pattern. (a) The silver ions are field emitted from the tip and accelerated towards the MCP screen detector from which the ion emission pattern is recorded with a video camera. A grid placed in the path of the ion beam is used to measure a certain fraction of the current. (b) A field ion pattern as observed at the MCP screen detector.

FIG.2 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.3
Ion current measurements. (a) Four current-voltage characteristics. The data marked with circles, triangles, and squares are taken as the voltage gradually increased from 15 to 20 kV, whereas the data marked with crosses are taken as the voltage decreased from 20 to 15 kV. A slight hysteresis is apparent. (b) The current vs time response of a silver ion source to various bias voltages between 9 and 12 kV shows rather stable behavior. (c) The first 20 min of a long term current measurement at constant voltage is depicted.

FIG.3 Download High Resolution Image (.zip file) | Export Figure to PowerPoint



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