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13 Aug 2007

Volume 91, Issue 7, Articles (07xxxx)

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Appl. Phys. Lett. 91, 071906 (2007); http://dx.doi.org/10.1063/1.2753092 (3 pages)

Cheng Zhang, Rajiv K. Kalia, Aiichiro Nakano, and Priya Vashishta
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Spatial investigation of the electron energy distribution function of the high-energy electron beam sustained in the low-pressure microwave surface-wave plasma

Milan Širý, Jan Husárik, and Masashi Kando

Appl. Phys. Lett. 91, 071501 (2007); http://dx.doi.org/10.1063/1.2772196 (3 pages) | Cited 5 times

Online Publication Date: 16 August 2007

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The electron energy distribution functions are studied in low-pressure microwave surface-wave sustained plasma using retarding field analyzer. Sustained discharge can be considered as superposition of the bulk plasma and the high-energy electron beamlike part. The beam component energy is pronounced up to 40 eV. Beam population reaches the maximum at energy of 16 eV with amount of 4% of the bulk plasma population.
Show PACS
52.50.Dg Plasma sources
52.35.-g Waves, oscillations, and instabilities in plasmas and intense beams
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