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14 Apr 2008

Volume 92, Issue 15, Articles (15xxxx)

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Appl. Phys. Lett. 92, 153101 (2008); http://dx.doi.org/10.1063/1.2907577 (3 pages)

H. Mino, Y. Kouno, K. Oto, K. Muro, R. Akimoto, and S. Takeyama
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Tin laser-produced plasma source modeling at 13.5 nm for extreme ultraviolet lithography

J. White, G. O’Sullivan, S. Zakharov, P. Choi, V. Zakharov, H. Nishimura, S. Fujioka, and K. Nishihara

Appl. Phys. Lett. 92, 151501 (2008); http://dx.doi.org/10.1063/1.2906901 (3 pages) | Cited 10 times

Online Publication Date: 16 April 2008

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Extreme ultraviolet lithography semiconductor manufacturing requires a 13.5 nm light source. Laser-produced plasma emission from Sn V–Sn XIV ions is one proposed industry solution. The effect of laser pulse width and spatial profile on conversion efficiency is analyzed over a range of power densities using a two-dimensional radiative magnetohydrodynamic code and compared to experiment using a 1.064 μm, neodymium:yttrium aluminium garnet laser on a planar tin target. The calculated and experimental conversion efficiencies and the effects of self-absorption in the plasma edge are compared. Best agreement between theory and experiment is found for an 8.0 ns Gaussian pulse.
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52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.30.Cv Magnetohydrodynamics (including electron magnetohydrodynamics)
52.50.Dg Plasma sources

Laser-produced energetic electron transport in overdense plasmas by wire guiding

C. T. Zhou, X. T. He, and M. Y. Yu

Appl. Phys. Lett. 92, 151502 (2008); http://dx.doi.org/10.1063/1.2908923 (3 pages) | Cited 17 times

Online Publication Date: 16 April 2008

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Laser-driven energetic electron transport in a two-layered (Au and DT) ultrahigh density plasma is investigated. It is shown that the jump in the resistivity at the interface of the two plasmas plays an important role in the slowing down of the energetic beam electrons and heating of the plasmas. Furthermore, a thin gold wire in the DT plasma can further slow down the beam electrons and absorb a part of the beam energy.
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52.38.Kd Laser-plasma acceleration of electrons and ions
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.40.Mj Particle beam interactions in plasmas
52.25.Fi Transport properties

A streamer-like atmospheric pressure plasma jet

Brian L. Sands, Biswa N. Ganguly, and Kunihide Tachibana

Appl. Phys. Lett. 92, 151503 (2008); http://dx.doi.org/10.1063/1.2909084 (3 pages) | Cited 73 times

Online Publication Date: 17 April 2008

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The properties of an atmospheric pressure plasma jet (APPJ) are examined in a single-cell dielectric capillary configuration. In contrast to some other flow-driven APPJs, this stable, cold plasma jet is electrically driven, composed of rapidly propagating ionization fronts with speeds of the order of 107 cm/s. Using spatially and temporally resolved optical diagnostics, it is demonstrated that the plasma jet is initiated independent of the dielectric barrier discharge inside the capillary. It is also shown that the properties and dynamics of this APPJ are directly analogous to those of positive corona streamer discharges.
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52.75.-d Plasma devices
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.80.Hc Glow; corona
52.25.-b Plasma properties

A single electrode room-temperature plasma jet device for biomedical applications

XinPei Lu, ZhongHe Jiang, Qing Xiong, ZhiYuan Tang, and Yuan Pan

Appl. Phys. Lett. 92, 151504 (2008); http://dx.doi.org/10.1063/1.2912524 (3 pages) | Cited 64 times

Online Publication Date: 17 April 2008

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A single electrode room-temperature atmospheric pressure plasma plume generated between a high-voltage electrode and the surrounding room air is reported. The plasma plume has a peak current of about 360 mA. This is highest current carried by a room-temperature plasma plume ever reported. The rotational and vibrational temperature of the plasma plume is about 300 and 2950 K, respectively. Emission spectra show that excited species, such as O, OH, N2+, etc., are present in the plasma plume.
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52.75.Hn Plasma torches
52.70.Kz Optical (ultraviolet, visible, infrared) measurements

Nonequilibrium and effect of gas mixtures in an atmospheric microplasma

Davide Mariotti

Appl. Phys. Lett. 92, 151505 (2008); http://dx.doi.org/10.1063/1.2912039 (3 pages) | Cited 42 times

Online Publication Date: 17 April 2008

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The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state.
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51.20.+d Viscosity, diffusion, and thermal conductivity
51.30.+i Thermodynamic properties, equations of state
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.25.Kn Thermodynamics of plasmas
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