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28 Jan 2008

Volume 92, Issue 4, Articles (04xxxx)

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Appl. Phys. Lett. 92, 041901 (2008); http://dx.doi.org/10.1063/1.2831926 (3 pages)

M. A. Avila, K. Suekuni, K. Umeo, H. Fukuoka, S. Yamanaka, and T. Takabatake
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Development of 40 MHz inductively coupled plasma source and frequency effects on plasma parameters

Hyun-Su Jun and Hong-Young Chang

Appl. Phys. Lett. 92, 041501 (2008); http://dx.doi.org/10.1063/1.2838306 (3 pages) | Cited 1 time

Online Publication Date: 29 January 2008

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A large-area inductively coupled plasma (ICP) source capable of securing azimuthal plasma uniformity at a 40.00 MHz has been developed. The antenna, referred to as a capacitor distributed resonance antenna, minimizes the azimuthally nonuniform antenna capacitive field with eight distributed vertical capacitors. The antenna was designed to maximize the antenna current using L-C series resonance. Based on plasma diagnostics with a 13.56 MHz conventional ICP, comparative analyses were performed in terms of the plasma density, electron temperature, and frequency characteristics of the electron energy probability function (EEPF). In addition, the frequency dependency of the EEPF was found in the collisional (νen>ω), normal skin [vth/δ⪡(ω2+νen2)1/2] regime and the physical causes of were examined.
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52.50.Dg Plasma sources
52.40.Fd Plasma interactions with antennas; plasma-filled waveguides
52.25.-b Plasma properties
52.70.-m Plasma diagnostic techniques and instrumentation

Extractable, elevated ion charge states in the transition regime from vacuum sparks to high current vacuum arcs

Georgy Yu. Yushkov and André Anders

Appl. Phys. Lett. 92, 041502 (2008); http://dx.doi.org/10.1063/1.2839616 (3 pages) | Cited 6 times

Online Publication Date: 1 February 2008

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Metal ions were extracted from pulsed discharge plasma operating in the transition region between vacuum spark and vacuum arc. At a peak current of about 4 kA, and with a pulse duration of 8 μs, we observed mean ion charges states of about 6 for several cathode materials. In the case of platinum, the highest average charge state was 6.74 with charge states present as high as 10, and with gold we found traces of charge state 11. At higher currents, nonmetallic contaminants started to dominate the ion beam, preventing further enhancement of the metal charge states.
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52.80.Mg Arcs; sparks; lightning; atmospheric electricity
52.80.Vp Discharge in vacuum
52.50.-b Plasma production and heating

Propagation of a femtosecond pulsed laser ablation plume into a background atmosphere

S. Amoruso, R. Bruzzese, X. Wang, and J. Xia

Appl. Phys. Lett. 92, 041503 (2008); http://dx.doi.org/10.1063/1.2839582 (3 pages) | Cited 18 times

Online Publication Date: 1 February 2008

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We investigate the effects of ambient gas on the expansion dynamics of laser plume produced during femtosecond laser ablation of a metallic target. We studied experimentally plume propagation for ambient air pressure ranging from 10−6 to 50 mbar, observing that the atomic and nanoparticles plume components experience different effects. We interpret these results with a simplified model of the plume front propagation, which is able to fully reproduce the main experimental features. Our results allow us to estimate quantitatively the nanoparticles plume content (up to about 80%), and can help identifying optimal conditions of nanoparticles deposition for thin films production.
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52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.38.Mf Laser ablation
52.77.Dq Plasma-based ion implantation and deposition
81.07.Bc Nanocrystalline materials
81.16.Mk Laser-assisted deposition

The dominant role of impurities in the composition of high pressure noble gas plasmas

T. Martens, A. Bogaerts, W. J. M. Brok, and J. V. Dijk

Appl. Phys. Lett. 92, 041504 (2008); http://dx.doi.org/10.1063/1.2839613 (3 pages) | Cited 28 times

Online Publication Date: 1 February 2008

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We present in this letter how a molecular gas such as nitrogen at different levels of impurity dominates the ionic composition of an atmospheric pressure noble gas plasma such as in helium. The positive charge in the discharge is only determined by helium ions if the discharge gas contains less than 1 ppm of impurity. Above this impurity level, the positive charge is completely determined by the impurity nitrogen. The higher the relative nitrogen concentration, the more N4+ dominates over N2+. If the impurity level is between 1 and about 20 ppm, N2+ is clearly the most abundant positive ion but for higher levels of impurity, N4+ almost completely determines the positive charge.
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61.72.sd Impurity concentration
82.80.-d Chemical analysis and related physical methods of analysis
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
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