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18 Aug 2008

Volume 93, Issue 7, Articles (07xxxx)

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Appl. Phys. Lett. 93, 073101 (2008); http://dx.doi.org/10.1063/1.2970055 (3 pages)

A. J. Du, Y. Chen, G. Q. Lu, and Sean C. Smith
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Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma

S. K. Karkari, A. R. Ellingboe, and C. Gaman

Appl. Phys. Lett. 93, 071501 (2008); http://dx.doi.org/10.1063/1.2971236 (3 pages) | Cited 7 times

Online Publication Date: 18 August 2008

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The spatio-temporal electron density oscillation in a narrow gap dual frequency (27.12 and 1.937 MHz) capacitive discharge has been measured for the first time by using a floating microwave hairpin resonance probe. By measuring the probe’s resonance frequency in a space and phase-resolved manner, we observe significant oscillation in electron density at both drive frequencies throughout the region between the parallel plate electrodes. The observed phenomenon is attributed to the influence of presheath electric fields of the opposing electrodes in alternate fashion.
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52.70.Gw Radio-frequency and microwave measurements
52.25.-b Plasma properties
52.35.Fp Electrostatic waves and oscillations (e.g., ion-acoustic waves)

Temporal-spatial-resolved spectroscopic study on the formation of an atmospheric pressure microplasma jet

Rubin Ye and Wei Zheng

Appl. Phys. Lett. 93, 071502 (2008); http://dx.doi.org/10.1063/1.2972119 (3 pages) | Cited 31 times

Online Publication Date: 18 August 2008

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Temporal-spatial-resolved optical emission spectroscopy was employed to shed light on the dynamic behavior and the propagation mechanism of a plasma, originating from a dielectric barrier discharge in helium inside a quartz tube for microplasma jet formation. The plasma propagated, regardless of the gas flow direction, in an accelerating manner at a high velocity up to 17 km/s, suggesting that the propagation was sustained by photoionization. A theoretical analysis demonstrated that the enhancement of the local electric field ahead of the ionization front was mainly responsible for the acceleration of the plasma near the electrode.
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52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.25.Jm Ionization of plasmas
52.80.-s Electric discharges

Control of the discharge chemistry of CHF3 in dual-frequency capacitively coupled plasmas

Q. H. Yuan, C. Ye, Y. Xin, X. J. Huang, Z. Y. Ning, and G. Q. Yin

Appl. Phys. Lett. 93, 071503 (2008); http://dx.doi.org/10.1063/1.2973402 (3 pages) | Cited 6 times

Online Publication Date: 18 August 2008

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The discharge chemistry of CHF3 in 27/2, 60/2, and 60/13.56 MHz dual-frequency capacitively coupled plasmas (DF-CCPs) is studied with actinometric optical emission spectroscopy and mass spectrometry. The frequency effect on the generation of reactive species was investigated. The reactive radicals and the density ratio of F/CF2 could be controlled by the 2 MHz rf power in 27/2 and 60/2 MHz DF-CCPs. The density ratios of F/CF2 in 27/2 and 60/2 MHz DF-CCPs are observed to increase with an increase in low-frequency power. However, this control could not be obtained in 60/13.56 MHz DF-CCP.
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52.20.Hv Atomic, molecular, ion, and heavy-particle collisions
52.80.Pi High-frequency and RF discharges
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
82.80.Ms Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI)

Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

Joakim Andersson, Arutiun P. Ehiasarian, and André Anders

Appl. Phys. Lett. 93, 071504 (2008); http://dx.doi.org/10.1063/1.2973179 (3 pages) | Cited 24 times

Online Publication Date: 19 August 2008

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Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.
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52.40.Hf Plasma-material interactions; boundary layer effects
52.20.Hv Atomic, molecular, ion, and heavy-particle collisions
52.70.-m Plasma diagnostic techniques and instrumentation
52.77.Dq Plasma-based ion implantation and deposition
79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces

Spatial retarding field energy analyzer measurements downstream of a helicon double layer plasma

W. Cox, C. Charles, R. W. Boswell, and R. Hawkins

Appl. Phys. Lett. 93, 071505 (2008); http://dx.doi.org/10.1063/1.2965866 (3 pages) | Cited 18 times

Online Publication Date: 20 August 2008

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Spatial ion energy measurements using a retarding field energy analyzer are performed in the exhaust of a 0.30 mTorr, 250 W helicon double layer plasma to investigate the divergence of the argon ion beam formed by acceleration in the double layer. Various divergence angles are computed by considering the radial distribution of beam density; the average beam ion diverging by 9°. The efficiency at which momentum is imparted parallel to the longitudinal axis of the thruster is calculated to be 98%. The results show that a few centimeters downstream of the source, the beam ions do not follow the magnetic field lines.
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52.25.Fi Transport properties
52.70.Ds Electric and magnetic measurements
52.70.Nc Particle measurements

A method to measure the electron temperature and density of a laser-produced plasma by Raman scattering

H. Jang, M. S. Hur, J. M. Lee, M. H. Cho, W. Namkung, and H. Suk

Appl. Phys. Lett. 93, 071506 (2008); http://dx.doi.org/10.1063/1.2973395 (3 pages) | Cited 1 time

Online Publication Date: 20 August 2008

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A method is proposed to investigate the electron temperature and density of a laser-produced plasma simultaneously, using the temperature dependence difference of the Raman forward scattering (RFS) and backward scattering (RBS). Density and temperature dependence of spectra from the RBS and the RFS in a laser produced plasma were investigated by one-dimensional particle-in-cell simulations in the nonrelativistic regime. This technique has a great advantage as a simple diagnostic of plasma characteristics in the sense that it can be performed only with the pump laser, without any additional probe laser.
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52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.38.Bv Rayleigh scattering; stimulated Brillouin and Raman scattering
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.65.Rr Particle-in-cell method
52.25.-b Plasma properties

Use of zeolites in the capture of charged particles from plasma

Sung Il Ahn, Seong Eui Lee, Sun Ho Kim, Kwan Hyun Cho, and Kyung Cheol Choi

Appl. Phys. Lett. 93, 071507 (2008); http://dx.doi.org/10.1063/1.2973158 (3 pages)

Online Publication Date: 22 August 2008

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The zeolites NaA and 13X were introduced to a coplanar discharge cell to investigate the behavior of charged particles from plasma. The zeolite crystals were attached to the surface without blocking their nanopores. The memory margin related to the accumulated charged particles on the surface indicated that the zeolites absorb charged particles. This phenomenon was also observed at the displacement and discharge current plots. Zeolites with a different window size cause abnormally high displacement and a saturation phenomenon of discharge currents. Note in particular that NaA seems to not only absorb charged particles but also capture gas molecules.
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68.43.-h Chemisorption/physisorption: adsorbates on surfaces

Effect of limiting the cathode surface on direct current microhollow cathode discharge in helium

T. Dufour, R. Dussart, P. Lefaucheux, P. Ranson, L. J. Overzet, M. Mandra, J.-B. Lee, and M. Goeckner

Appl. Phys. Lett. 93, 071508 (2008); http://dx.doi.org/10.1063/1.2966144 (3 pages) | Cited 4 times

Online Publication Date: 22 August 2008

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This paper describes how to light several microdischarges in parallel without having to individually ballast each one. The V-I curve of a microhollow cathode discharge is characterized by a constant voltage in the normal glow regime because the plasma is able to spread over the cathode surface area to provide the additional secondary electrons needed. If one limits the cathode surface area, the V-I characteristic can be forced into an abnormal glow regime in which the operating voltage must increase with the current. It is then possible to light several microdischarges mounted in parallel without ballasting them individually.
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52.80.Hc Glow; corona
52.30.-q Plasma dynamics and flow
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