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Appl. Phys. Lett. 94, 011501 (2009); http://dx.doi.org/10.1063/1.3064159 (3 pages)

Self-pulsing 104 A cm−2 current density discharges in dielectric barrier Al/Al2O3 microplasma devices

D. Yarmolich1, Ya. E. Krasik1, E. Stambulchik2, V. Bernshtam2, J. K. Yoon3, B. Herrera3, S.-J. Park3, and J. G. Eden3

1Department of Physics, Technion, Haifa 32000, Israel
2Department of Physics, Weizmann Institute of Science, Rehovot 76100, Israel
3Department of Electrical and Computer Engineering, University of Illinois, Urbana, Illinois, 61801, USA

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(Received 27 September 2008; accepted 10 December 2008; published online 6 January 2009)

Excitation of Al/Al2O3 microplasma devices with 50 μs, 800 V pulses produces, in Ar/H2 gas mixtures at 600 Torr, ∼ 6 A current pulses with a duration of ∼ 30 ns. Corresponding to peak current and power densities of ∼ 104 A/cm2 and ∼ 2.5 GW/cm3, respectively, these pulses are generated in a 10 μs burst in which the voltage self-pulses at a repetition frequency of ∼ 3 MHz. Analysis of the Hα, Hβ, and Ar II emission line profiles yields a plasma density of ∼ 1017 cm−3, and the emission of O IV ions suggests the presence of energetic electrons. Images of the microplasma indicate that the plasma is initiated by surface flashover and extends ∼ 200 μm outside the microcavity.

© 2009 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 52.80.-s

    Electric discharges

  • 52.25.Os

    Emission, absorption, and scattering of electromagnetic radiation

  • 52.75.-d

    Plasma devices

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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