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Applied Physics Letters / Volume 94 / Issue 16 / LASERS, OPTICS, AND OPTOELECTRONICS
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Appl. Phys. Lett. 94, 161113 (2009); http://dx.doi.org/10.1063/1.3114416 (3 pages)

Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies

X. G. Peralta1, M. C. Wanke1, C. L. Arrington1, J. D. Williams1, I. Brener1, A. Strikwerda2, R. D. Averitt2, W. J. Padilla3, E. Smirnova4, A. J. Taylor4, and J. F. O’Hara4

1Sandia National Laboratories, Albuquerque, New Mexico 87185, USA
2Department of Physics, Boston University, Boston, Massachusetts 02215, USA
3Department of Physics, Boston College, Chestnut Hill, Massachusetts 02467, USA
4Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA

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(Received 12 November 2008; accepted 13 March 2009; published online 24 April 2009)

A possible path for fabricating three-dimensional metamaterials with curved geometries at optical and infrared frequencies is to stack flexible metamaterial layers. We have fabricated highly uniform metamaterials at terahertz frequencies on large-area, low-stress, free-standing 1 μm thick silicon nitride membranes. Their response remains comparable to that of similar structures on thick substrates as measured by the quality factor of the resonances. Transmission measurements with a Fourier transform infrared spectrometer highlight the advantage of fabricating high frequency metamaterials on thin membranes as etalon effects are eliminated. Releasing the membranes enables layering schemes and placement onto curved surfaces in order to create three-dimensional structures.

© 2009 American Institute of Physics

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KEYWORDS and PACS

Keywords

Fourier transform spectra, infrared spectra, membranes, metamaterials, microwave materials, Q-factor, silicon compounds

PACS

  • 42.70.-a

    Optical materials

  • 84.40.-x

    Radiowave and microwave (including millimeter wave) technology

  • 82.45.Mp

    Thin layers, films, monolayers, membranes

  • 78.30.-j

    Infrared and Raman spectra

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3114416

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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Figures (click on thumbnails to view enlargements)

FIG.1
Transmission spectra (solid dots) and simulation results (dashed line) for (a) double SRR (dSRR) and (c) electrical resonator (E2). [(b) and (d)] Corresponding phase data. Center inset: fully processed wafer where the Si3N4 membrane windows are evident.

FIG.1 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.2
Comparison of [(a) and (c)] experimental transmission spectra and [(b) and (d)] simulation results for the SRR. Terahertz electric field polarized [(a) and (b)] parallel and [(c) and (d)] perpendicular to the gap. In (c) open (solid) circles correspond to THz-TDS (FTIR) measurements.

FIG.2 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.3
(a) Quality factor extracted from the measured transmission spectra as a function of resonance frequency. Solid (open) symbols were obtained from the literature (metamaterials on Si3N4 membranes). Squares (circles) have similar geometry (resonant frequency). (b) Quality factor as a function of metal thickness in units of skin depth for SRR (▲), E1 (▼), E2 (○), and dSRR (×) on Si3N4 membranes.

FIG.3 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.4
(a) Metamaterial covered membrane wrapped around Tygon tubing. Minor ticks on ruler are millimeters. (b) Zoom in showing the electric metamaterial E1 units.

FIG.4 Download High Resolution Image (.zip file) | Export Figure to PowerPoint



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