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Applied Physics Letters / Volume 94 / Issue 16 / STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER

Appl. Phys. Lett. 94, 161903 (2009); http://dx.doi.org/10.1063/1.3122344 (3 pages)

Migration of species in a prototype diffusion barrier: Cu, O, and H in TiN

L. Tsetseris1,2, S. Logothetidis1, and S. T. Pantelides2,3

1Department of Physics, Aristotle University of Thessaloniki, GR-54124 Thessaloniki, Greece
2Department of Physics and Astronomy, Vanderbilt University, Nashville, Tennessee 37235, USA
3Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA

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(Received 31 January 2009; accepted 30 March 2009; published online 20 April 2009)

Experimental data on the migration of Cu impurities in TiN and in similar diffusion-barriers used in electronic devices have led to conflicting suggestions about the underlying physical mechanisms. Here we use results of first-principles calculations, which are in agreement with measured activations energies, to elucidate the atomic-scale processes of moderate and rapid diffusion of Cu through the bulk and intergrain voids of TiN films, respectively. We also find that O and H impurities are fast diffusers in TiN. The results offer an assessment for the efficiency of TiN diffusion-barriers with respect to properties, such as nature of impurities, stoichiometry, and crystallinity.

© 2009 American Institute of Physics

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KEYWORDS and PACS

Keywords

ab initio calculations, copper, diffusion barriers, hydrogen, impurities, stoichiometry, titanium compounds, voids (solid)

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3122344

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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    S. Q. Wang, O. Raaijmakers, B. J. Burrow, S. Suthar, S. Redkar, and K. B. Kim, J. Appl. Phys. 68, 5176 (1990)JAPIAU000068000010005176000001.

    A. M. Hoyas, J. Schuhmacher, D. Shamiryan, J. Waeterloos, W. Besling, and J. P. Celis, J. Appl. Phys. 95, 381 (2004)JAPIAU000095000001000381000001.

    L. C. Yang, C. S. Hsu, G. S. Shen, C. C. Fu, J. M. Zuo, and B. Q. Lee, Appl. Phys. Lett. 87, 121911 (2005)APPLAB000087000012121911000001.

    P. Majumder and C. G. Takoudis, Appl. Phys. Lett. 91, 162108 (2007)APPLAB000091000016162108000001.

    L. C. Leu, D. P. Norton, L. McElwee-White, and T. J. Anderson, Appl. Phys. Lett. 92, 111917 (2008)APPLAB000092000011111917000001.

    L. E. Koutsokeras, G. Abadias, C. E. Lekka, G. M. Matenoglou, D. F. Anagnostopoulos, G. A. Evangelakis, and P. Patsalas, Appl. Phys. Lett. 93, 011904 (2008)APPLAB000093000001011904000001.

    L. Tsetseris, N. Kalfagiannis, S. Logothetidis, and S. T. Pantelides, Phys. Rev. B 78, 094111 (2008).

    L. Tsetseris, X. J. Zhou, D. M. Fleetwood, R. D. Schrimpf, and S. T. Pantelides, Appl. Phys. Lett. 86, 142103 (2005)APPLAB000086000014142103000001.

    J. P. Perdew and Y. Wang, Phys. Rev. B 45, 13244 (1992).

    P. E. Blöchl, Phys. Rev. B 50, 17953 (1994).

    G. Kresse and J. Joubert, Phys. Rev. B 59, 1758 (1999).

    D. J. Chadi and M. L. Cohen, Phys. Rev. B 8, 5747 (1973).

    H. Höchst, R. D. Bringans, P. Steiner, and T. Wolf, Phys. Rev. B 25, 7183 (1982).

    L. Tsetseris, N. Kalfagiannis, S. Logothetidis, and S. T. Pantelides, Phys. Rev. Lett. 99, 125503 (2007).

    L. Tsetseris, N. Kalfagiannis, S. Logothetidis, and S. T. Pantelides, Phys. Rev. B 76, 224107 (2007).

    C. S. Nichols, C. G. van de Walle, and S. T. Pantelides, Phys. Rev. Lett. 62, 1049 (1989).

    P. E. Blöchl, C. G. van de Walle, and S. T. Pantelides, Phys. Rev. Lett. 64, 1401 (1990).


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