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19 Oct 2009

Volume 95, Issue 16, Articles (16xxxx)

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Appl. Phys. Lett. 95, 162501 (2009); http://dx.doi.org/10.1063/1.3248257 (3 pages)

W. W. Lei, D. Liu, P. W. Zhu, X. H. Chen, Q. Zhao, G. H. Wen, Q. L. Cui, and G. T. Zou
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Real time monitoring of the interaction of Si (100) with atomic hydrogen: The “H-insertion/Si-etching” kinetic model explaining Si surface modifications

Giuseppe V. Bianco, Maria Losurdo, Maria M. Giangregorio, Pio Capezzuto, and Giovanni Bruno

Appl. Phys. Lett. 95, 161501 (2009); http://dx.doi.org/10.1063/1.3245312 (3 pages) | Cited 4 times

Online Publication Date: 20 October 2009

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The interaction of p- and n-type crystalline silicon [c-Si (100)], with atomic hydrogen produced by a remote radiofrequency (13.56 MHz) H2 plasma has been investigated in real time using in situ spectroscopic ellipsometry. The effects of substrate doping, temperature and time on the c-Si surface modifications are discussed. A thicker hydrogenated surface layer forms for n-type Si. This hydrogenated layer is subsequently etched by further exposure to hydrogen. A kinetic model based on the competition between hydrogen insertion and silicon etching is proposed to explain modifications of c-Si, and the rate constants of the hydrogen insertion and silicon etching processes are determined.
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81.65.Cf Surface cleaning, etching, patterning
82.20.Pm Rate constants, reaction cross sections, and activation energies
82.30.Nr Association, addition, insertion, cluster formation
68.47.Fg Semiconductor surfaces

Linear arrays of stable atmospheric pressure microplasmas

Zhi-Bo Zhang and Jeffrey Hopwood

Appl. Phys. Lett. 95, 161502 (2009); http://dx.doi.org/10.1063/1.3251793 (3 pages) | Cited 2 times

Online Publication Date: 20 October 2009

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Microdischarges produce cold atmospheric plasma when the discharge current is limited by the quenching of a microwave resonator. A quarter-wavelength microstripline resonator is shown to support stable atmospheric microplasma in pure argon. Electrical characterization of the microplasma shows that its impedance is resistive and capacitive (Zp = 500−j900 Ω). An array of these linear resonators generates a stable, line-shaped microplasma operating from a single power source due to close-coupling among adjacent resonators. Both simulations and experiments confirm that coupled-mode theory describes the collective behavior of linear microplasma arrays.
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52.50.Dg Plasma sources
52.80.Pi High-frequency and RF discharges
52.25.Fi Transport properties
84.40.Az Waveguides, transmission lines, striplines
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