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Appl. Phys. Lett. 95, 231109 (2009); http://dx.doi.org/10.1063/1.3272271 (3 pages)
Excitation wavelength independent sensitized Er3+ concentration in as-deposited and low temperature annealed Si-rich SiO2 films
(Received 3 July 2009; accepted 16 November 2009; published online 9 December 2009)
© 2009 American Institute of Physics
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KEYWORDS and PACS
Keywords
annealing, doping profiles, erbium, photoluminescence, silicon compounds
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