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Appl. Phys. Lett. 95, 231905 (2009); http://dx.doi.org/10.1063/1.3271697 (3 pages)

Size-effects on the optical properties of zirconium oxide thin films

C. V. Ramana1, R. S. Vemuri1, I. Fernandez1, and A. L. Campbell2

1Department of Mechanical Engineering, University of Texas at El Paso, El Paso, Texas 79968, USA
2Materials and Manufacturing Directorate (RX), Wright-Patterson Air Force Base (WPAFB), Ohio 45433, USA

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(Received 1 October 2009; accepted 31 October 2009; published online 8 December 2009)

Zirconium oxide (ZrO2) thin films with an average crystallite-size (L) ranging from 5 to 25 nm were grown by sputter deposition onto optical grade quartz substrates. The optical properties of grown ZrO2 films were evaluated using optical transmission and reflectance spectroscopic measurements. The size-effects were significant on the optical characteristics of ZrO2 films. The bandgap energy (Eg) was found to increase from 5.78 to 6.07 eV with decreasing L values from 20 to 7 nm. A direct, linear inverse L-Eg relationship found for ZrO2 films suggest that tuning optical properties for desired applications can be achieved by controlling the size.

© 2009 American Institute of Physics

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  2. Erratum

  3. Erratum: “Size effects on the optical properties of zirconium oxide thin films” [Appl. Phys. Lett. 95, 231905 (2009)]
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KEYWORDS and PACS

PACS

  • 78.66.Db

    Elemental semiconductors and insulators

  • 78.67.-n

    Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures

  • 81.16.-c

    Methods of micro- and nanofabrication and processing

  • 81.15.Cd

    Deposition by sputtering

  • 78.20.Ci

    Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)

  • 73.22.-f

    Electronic structure of nanoscale materials and related systems

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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