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Appl. Phys. Lett. 95, 231909 (2009); http://dx.doi.org/10.1063/1.3272017 (3 pages)

The origin and evolution of V-defects in InxAl1−xN epilayers grown by metalorganic chemical vapor deposition

Z. L. Miao1, T. J. Yu1, F. J. Xu1, J. Song1, C. C. Huang1, X. Q. Wang1, Z. J. Yang1, G. Y. Zhang1, X. P. Zhang2, D. P. Yu2, and B. Shen1

1State Key Laboratory of Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, People’s Republic of China
2Electron Microscope Laboratory, Peking University, Beijing 100871, People’s Republic of China

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(Received 27 October 2009; accepted 14 November 2009; published online 9 December 2009)

Near-lattice-matched and highly compressive-strained InxAl1−xN epilayers were grown on GaN templates by metalorganic chemical vapor deposition. The V-defects associated with screw-component threading dislocations (TDs) were found in all the InxAl1−xN layers. Their origin and evolution were investigated through near-lattice-matched In0.173Al0.827N layers with different thicknesses. Furthermore, small V-defects not associated with TDs were also found in InxAl1−xN layers with high In composition (x = 0.231). Stacking mismatch boundaries induced by lattice relaxation in InxAl1−xN epilayers under large strain is believed to be another mechanism forming V-defects.

© 2009 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 61.72.jn

    Color centers

  • 68.55.ag

    Semiconductors

  • 61.72.Lk

    Linear defects: dislocations, disclinations

  • 81.15.Gh

    Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)

  • 61.72.Nn

    Stacking faults and other planar or extended defects

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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