APL Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter iResearch App Facebook

BROWSE VOLUMES

Year Range: 
Search Issue | RSS Feeds RSS
Previous Issue Next Issue

10 Aug 2009

Volume 95, Issue 6, Articles (06xxxx)

Issue Cover Spotlight Figure

Appl. Phys. Lett. 95, 062501 (2009); http://dx.doi.org/10.1063/1.3200226 (3 pages)

O. Vávra, W. Pfaff, and Ch. Strunk
Enlarge Image | Read More
Return to All Sections
back to top
RSS Feeds

Experimental investigation of transition from Fowler–Nordheim field emission to space-charge-limited flows in a nanogap

Sudeep Bhattacharjee and Tathagata Chowdhury

Appl. Phys. Lett. 95, 061501 (2009); http://dx.doi.org/10.1063/1.3194297 (3 pages) | Cited 4 times

Online Publication Date: 10 August 2009

Full Text: Read Online (HTML) | Download PDF

Show Abstract
An experimental investigation of the transition from Fowler–Nordheim (FN) field emission to space-charge-limited (SCL) flows in a nanogap is presented. Electrodes with gap size D ∼ 30–70 nm corresponding to D/λo up to a maximum of ∼ 2×103, where λo is the de Broglie wavelength of the space-charge-electrons, are experimented. The transition from the FN field emission to the classical SCL flow is a function of the applied bias and lies in the range 5–15 V. The equilibrium transmitted current density for the 50 nm sample indicates a transition from the FN to the quantum SCL flow at ∼ 0.4 V with D/λo of ∼ 35 and then gradually to the classical SCL behavior as the voltage is increased beyond ∼ 9 V. The experiments indicate no sharp demarcation between the different regimes.
Show PACS
73.63.Rt Nanoscale contacts
72.20.Ht High-field and nonlinear effects
82.45.Fk Electrodes

Properties of dielectric-barrier-free atmospheric pressure microplasma driven by submicrosecond dc pulse voltage

Chang-Seung Ha (하창승), Joon-Young Choi (최준영), Dong-Hyun Kim (김동현), Chung-Hoo Park (박정후), Hae June Lee (이해준), and Ho-Jun Lee (이호준)

Appl. Phys. Lett. 95, 061502 (2009); http://dx.doi.org/10.1063/1.3194298 (3 pages) | Cited 7 times

Online Publication Date: 10 August 2009

Full Text: Read Online (HTML) | Download PDF

Show Abstract
Atmospheric pressure microplasma driven by dc pulse is developed. This device has a simple structure comprised of a flowing helium (He) feed gas and dielectric-free metal electrodes without an external current limiting resistor. It is shown that a stable glow mode plasma can be sustained without arc runaway by limiting the voltage pulse width to shorter than 300 ns. The properties of the device are reported in terms of discharge current waveforms, rotational temperature of N2+, and spatiotemporally resolved optical emission characteristics.
Show PACS
52.75.-d Plasma devices
52.80.Hc Glow; corona
52.25.Mq Dielectric properties
52.50.Dg Plasma sources

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

Qiu Yuan Lu, Liu He Li, Jian Hui Li, Ricky K. Y. Fu, and Paul K. Chu

Appl. Phys. Lett. 95, 061503 (2009); http://dx.doi.org/10.1063/1.3204697 (3 pages) | Cited 3 times

Online Publication Date: 12 August 2009

Full Text: Read Online (HTML) | Download PDF

Show Abstract
The implantation energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation (EGD-PIII) is investigated numerically and experimentally. Depth profiles obtained from different samples processed by EGD-PIII and traditional PIII are compared. The retained doses under different pulse widths are calculated by integrating the area under the depth profiles. Our results indicate that the improvement in the impact energy and retained dose uniformity by this technique is remarkable.
Show PACS
52.77.Dq Plasma-based ion implantation and deposition
61.72.U- Doping and impurity implantation
52.80.Hc Glow; corona
Return to All Sections
Close

Google Calendar

ADVERTISEMENT

Go to AIP Home   © AIP Publishing LLC
close