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Applied Physics Letters / Volume 96 / Issue 1 / ORGANIC ELECTRONICS AND PHOTONICS
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Appl. Phys. Lett. 96, 013303 (2010); http://dx.doi.org/10.1063/1.3280044 (3 pages)

High-Q conical polymeric microcavities

Tobias Grossmann1, Mario Hauser1, Torsten Beck1, Cristian Gohn-Kreuz1, Matthias Karl1, Heinz Kalt1, Christoph Vannahme2, and Timo Mappes2

1Institut für Angewandte Physik, Karlsruhe Institute of Technology (KIT), Wolfgang-Gaede-Str.1, 76131 Karlsruhe, Germany
2Institut für Mikrostrukturtechnik, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

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(Received 14 October 2009; accepted 6 December 2009; published online 4 January 2010)

We report on the fabrication of high-Q microresonators made of low-loss, thermoplastic polymer poly(methyl methacrylate) (PMMA) directly processed on a silicon substrate. Using this polymer-on-silicon material in combination with a thermal reflow step enables cavities of conical geometry with an ultrasmooth surface. The cavity Q factor of these PMMA resonators is above 2×106 in the 1300 nm wavelength range. Finite element simulations show the existence of a variety of “whispering gallery” modes in these resonators explaining the complexity of the measured transmission spectra.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

finite element analysis, geometrical optics, microcavities, micromechanical resonators, optical polymers

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3280044

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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Figures (click on thumbnails to view enlargements)

FIG.1
Process steps for fabricating high-Q conical microcavities. After exposure (a) and development (b) of PMMA, the silicon substrate is etched using XeF2 (c). A thermal reflow (d) then forms the conical geometry of the cavities.

FIG.1 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.2
Scanning electron micrographs of polymer microcavities. The images show a conical resonator with a maximum diameter of 40 μm [(a) and (c)] and a microdisk (b) of 47 μm diameter fabricated with electron beam lithography. The Q factor of the conical microresonator is 2×106.

FIG.2 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.3
Transmission spectrum of a tapered fiber optically coupled to a conical resonator. Simulations show that the deep peaks are fundamental TE and TM modes of the resonator. They are mainly accompanied by higher order radial modes of both polarizations. The measured free spectral range is 9.36 nm.

FIG.3 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.4
Simulated mode structure of a conical microcavity. The intensity distribution and resonance wavelength of the WGMs are calculated. The azimuthal mode number m of the presented WGMs is 105.

FIG.4 Download High Resolution Image (.zip file) | Export Figure to PowerPoint



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