APL Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter UniPHY Group iResearch App Facebook

Applied Physics Letters / Volume 96 / Issue 10 / PLASMAS AND ELECTRICAL DISCHARGES

Appl. Phys. Lett. 96, 101504 (2010); http://dx.doi.org/10.1063/1.3309589 (3 pages)

Evolution of electron temperature in low pressure magnetized capacitive plasma

S. J. You1, G. Y. Park2, J. H. Kwon1, J. H. Kim1, H. Y. Chang3, J. K. Lee2, D. J. Seong1, and Y. H. Shin1

1Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 305-306, Republic of Korea
2Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
3Korea Advanced Institute of Science and Technology, Daejeon 305-701, Republic of Korea

View MapView Map

(Received 9 October 2009; accepted 21 December 2009; published online 10 March 2010)

The evolution of electron temperature in a low pressure magnetized capacitive discharge was investigated under the collisionless electron heating regime. The results showed that while the electron temperature increases monotonously with the magnetic field in previous study [ Turner et al., Phys. Rev. Lett. 76, 2069 (1996) ], the electron temperature in our experiment exhibited nonmonotonic evolution behavior with the magnetic field. This nonmonotonic evolution of the electron temperature with the magnetic field was shown to be a combined effect of suppressing electron resonance heating and enhancing collisional heating while increasing the magnetic field.

© 2010 American Institute of Physics

RELATED DATABASES

To view database links for this article, you need to log in.

KEYWORDS and PACS

Keywords

discharges (electric), plasma collision processes, plasma temperature

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3309589

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    V. A. Godyak, IEEE Trans. Plasma Sci. 34, 755 (2006)APPLAB000069000025003818000001.

    N. Sternberg, V. A. Godyak, and D. Hoffman, Phys. Plasmas 13, 063511 (2006)PHPAEN000013000006063511000001.

    M. M. Turner, D. A. W. Hutchinson, R. A. Doyle, and M. B. Hopkins, Phys. Rev. Lett. 76, 2069 (1996).

    S. J. You and H. Y. Chang, Phys. Plasmas 13, 043503 (2006)PHPAEN000013000004043503000001.

    S. J. You, S. S. Kim, and H. Y. Chang, Appl. Phys. Lett. 85, 4872 (2004)APPLAB000085000021004872000001.

    G. Y. Park, S. J. You, F. Iza, and J. K. Lee, Phys. Rev. Lett. 98, 085003 (2007).

    Y. M. Aliev, I. D. Kaganovich, and H. Schuter, Phys. Plasmas 4, 2413 (1997)PHPAEN000004000007002413000001.

    I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin, Appl. Phys. Lett. 69, 3818 (1996)APPLAB000069000025003818000001.

    I. D. Kaganovich, Phys. Rev. Lett. 82, 327 (1999).

    I. D. Kaganovich, O. V. Polomarov, and E. Theodosiou, Phys. Plasmas 11, 2399 (2004)PHPAEN000011000005002399000001.


Figures (2)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)



Close

Google Calendar

ADVERTISEMENT

Your Recent History Recent History Help

Recently Viewed

  1. Evolution of electron temperature in low pressure magnetized capacitive plasma
  2. Acoustic stabilization of electric arc instabilities in nontransferred plasma torches
  3. Strong drive compression of a gas-cooled positron plasma
  4. Plasma effects on subcellular structures
  5. Nanogap quantum dot photodetectors with high sensitivity and bandwidth
Go to AIP Home
Copyright © American Institute of Physics
close