APL Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter UniPHY Group iResearch App Facebook

Applied Physics Letters / Volume 96 / Issue 18 / DEVICE PHYSICS

Appl. Phys. Lett. 96, 183503 (2010); http://dx.doi.org/10.1063/1.3427363 (3 pages)

Dielectric charging characterization on microelectromechanical switches by discharge current transient

David Molinero1,2 and Luis Castaner2

1Lehigh University, 5 East Packer Avenue, Bethlehem, Pennsylvania 18015, USA
2Universitat Politecnica de Catalunya, Jordi Girona 1-3, Modul C4, 08034 Barcelona, Spain

View MapView Map

(Received 16 December 2009; accepted 16 April 2010; published online 6 May 2010)

The discharge current method is used to quantify the dielectric reliability of microelectromechanical switches. Two dielectrics, silicon oxide and silicon nitride, were used to extract the charge trapped, the emissivity and the dielectric relaxation time by means of a circuital model with a current source simulating the charge trap. A figure of merit is proposed to better quantify the dielectric reliability issues.

© 2010 American Institute of Physics

RELATED DATABASES

To view database links for this article, you need to log in.

KEYWORDS and PACS

Keywords

dielectric devices, dielectric relaxation, discharges (electric), emissivity, microswitches, silicon compounds, transients

PACS

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 84.32.Dd

    Connectors, relays, and switches

  • 85.50.-n

    Dielectric, ferroelectric, and piezoelectric devices

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3427363

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    D. Molinero and L. Castañer, Appl. Phys. Lett. 92, 043502 (2008)APPLAB000092000004043502000001.

    D. Molinero and L. Castaner, Appl. Phys. Lett. 94, 043503 (2009)APPLAB000094000004043503000001.

    P. C. Arnett, J. Appl. Phys. 46, 5236 (1975)JAPIAU000046000012005236000001.

    D. J. Dimaria, F. J. Feigl, and S. R. Butler, Phys. Rev. B 11, 5023 (1975).


Figures (3)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)



Close

Google Calendar

ADVERTISEMENT

Your Recent History Recent History Help

Recently Viewed

  1. Dielectric charging characterization on microelectromechanical switches by discharge current transient
  2. Printed energy storage devices by integration of electrodes and separators into single sheets of paper
  3. Space charge limited current in a gap combined of free space and solid
  4. Improved efficiency of bulk heterojunction poly(3-hexylthiophene):[6,6]-phenyl-C61-butyric acid methyl ester photovoltaic devices using discotic liquid crystal additives
  5. Electron transport in rubrene single-crystal transistors
Go to AIP Home
Copyright © American Institute of Physics
close