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Applied Physics Letters / Volume 96 / Issue 22 / DEVICE PHYSICS

Appl. Phys. Lett. 96, 223504 (2010); http://dx.doi.org/10.1063/1.3440370 (3 pages)

Guided acoustic wave resonators using an acoustic Bragg mirror

I. Koné1, F. Domingue1, A. Reinhardt1, H. Jacquinot1, M. Borel1, M. Gorisse1, G. Parat1, F. Casset1, D. Pellissier-Tanon2, J. F. Carpentier2, L. Buchaillot3, and B. Dubus3

1CEA, Leti, Minatec, F-38054 Grenoble, France
2FTM-Crolles, STMicroelectronics, F-38920 Crolles, France
3IEMN, Département ISEN, UMR CNRS 8520, Lille F-59046, France

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(Received 26 February 2010; accepted 29 April 2010; published online 3 June 2010)

Lamb wave devices have recently gained an interest for providing narrow bandpass filters in wireless transmission systems. Their cointegration with film bulk acoustic wave resonators is a major advantage, enabling the possibility to provide simultaneously several radio frequency and intermediate-frequency filters in a single fabrication. Similarly, in this work, we report the fabrication of resonators using waves guided in a piezoelectric layer deposited atop a Bragg mirror. Such waves exhibit a behavior close to Lamb waves, thanks to the acoustic isolation provided by the mirror, while being cointegrated along with solidly mounted resonator structures.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

acoustic resonators, aluminium compounds, band-pass filters, III-V semiconductors, mirrors, piezoelectric devices, piezoelectric thin films, silicon compounds, surface acoustic waves

PACS

  • 85.50.-n

    Dielectric, ferroelectric, and piezoelectric devices

  • 43.58.Kr

    Spectrum and frequency analyzers and filters; acoustical and electrical oscillographs; photoacoustic spectrometers; acoustical delay lines and resonators

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3440370

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    A. Reinhardt, T. Pastureaud, S. Ballandras, and V. Laude, J. Appl. Phys. 94, 6923 (2003)JAPIAU000094000010006923000001.


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