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Applied Physics Letters / Volume 96 / Issue 26 / LASERS, OPTICS, AND OPTOELECTRONICS

Appl. Phys. Lett. 96, 261103 (2010); http://dx.doi.org/10.1063/1.3458704 (3 pages)

Femtosecond laser near-field nanoablation patterning using Mie resonance high dielectric constant particle with small size parameter

Yuto Tanaka, Go Obara, Akira Zenidaka, Mitsuhiro Terakawa, and Minoru Obara

School of Integrated Design Engineering, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama-shi 223-8522, Japan

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(Received 13 April 2010; accepted 8 June 2010; published online 29 June 2010)

We demonstrate near-field nanohole patterning using a Mie resonance, small size parameter particle for nanofabrication technology regardless of substrate’s refractive index. Maximal enhancement factor and nearly smallest spot diameter among the same size dielectric particles are simultaneously obtainable on both low-refractive-index SiO2 and high-refractive-index Si substrates with a 200 nm particle of magnetic quadrupole resonance scattering mode (n ∼ 2.7) at 400 nm excitation wavelength. Circular nanoholes with approximately 100 nm in diameter were fabricated on both substrates using a 200 nm amorphous TiO2 particle (n = 2.66+0.024i) even with lower laser fluences than a half ablation threshold of the bare substrates.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

laser ablation, nanofabrication, nanopatterning, refractive index, silicon compounds, titanium compounds

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3458704

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    F. F. Ren, M. B. Yu, J. D. Ye, Q. Chen, S. T. Tan, G. Q. Lo, and D. L. Kwong, Appl. Phys. Lett. 93, 091901 (2008)APPLAB000093000009091901000001.

    B. J. Messinger, K. U. Raben, R. K. Chang, and P. W. Barber, Phys. Rev. B 24, 649 (1981).

    A. R. Forouhi and I. Bloomer, Phys. Rev. B 34, 7018 (1986).


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