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Appl. Phys. Lett. 96, 261901 (2010); http://dx.doi.org/10.1063/1.3457864 (3 pages)

Size controlled synthesis of Ge nanocrystals in SiO2 at temperatures below 400 °C using magnetron sputtering

B. Zhang, S. Shrestha, M. A. Green, and G. Conibeer

ARC Photovoltaics Centre of Excellence, University of New South Wales, Sydney, New South Wales 2052, Australia

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(Received 15 April 2010; accepted 8 June 2010; published online 28 June 2010)

A simple and silicon process-compatible technique is reported for the synthesis of Ge nanocrystals (Ge-ncs) at low temperatures below 400 °C, which is much lower than the typical growth temperatures. The Ge-ncs were found to form only within a temperature window between 350 and 420 °C. The underlying mechanism has been explained by a competitive process between Volmer–Weber growth and oxidation reaction. We further implemented this technique in the fabrication of multilayered Ge-ncs which exhibited controllable crystallite size with high crystallization quality. The low temperature technique developed in this work would allow production of Ge-ncs and relative devices on low cost substrates, such as glass.

© 2010 American Institute of Physics

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0003-6951 (print)  
1077-3118 (online)

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    W. K. Choi, W. K. Chim, C. L. Heng, L. W. Teo, V. Ho, V. Ng, D. A. Antoniadis, and E. A. Fitzgerald, Appl. Phys. Lett. 80, 2014 (2002)APPLAB000080000011002014000001.

    Y. Maeda, N. Tsukamoto, Y. Yazawaa, Y. Kanemitsu, and Y. Masumoto, Appl. Phys. Lett. 59, 3168 (1991)APPLAB000059000024003168000001.

    D. C. Paine, C. Caragianis, T. Y. Kim, Y. Shigesato, and T. Ishahara, Appl. Phys. Lett. 62, 2842 (1993)APPLAB000062000022002842000001.

    K. V. Shcheglov, C. M. Yang, K. J. Vahala, and H. Atwater, Appl. Phys. Lett. 66, 745 (1995)APPLAB000066000006000745000001.

    A. K. Dutta, Appl. Phys. Lett. 68, 1189 (1996)APPLAB000068000009001189000001.

    K. S. Min, K. V. Shcheglov, C. M. Yang, H. A. Atwater, M. L. Brongersma, and A. Polman, Appl. Phys. Lett. 68, 2511 (1996)APPLAB000068000018002511000001.

    M. Zacharias, J. Heitmann, R. Scholz, U. Kahler, M. Schmidt, and J. Blasing, Appl. Phys. Lett. 80, 661 (2002)APPLAB000080000004000661000001.

    V. Craciun, I. W. Boyd, A. H. Reader, and D. E. W. Vandenhoudt, Appl. Phys. Lett. 65, 3233 (1994)APPLAB000065000025003233000001.

    H. Miguez, V. Fornes, F. Meseguer, F. Marquez, and C. Lopez, Appl. Phys. Lett. 69, 2347 (1996)APPLAB000069000016002347000001.

    C. J. Sahle, C. Sternemann, H. Conrad, A. Herdt, O. M. Feroughi, M. Tolan, A. Hohl, R. Wagner, D. Lützenkirchen–Hecht, R. Frahm, A. Sakko, and K. Hämäläinen, Appl. Phys. Lett. 95, 021910 (2009)APPLAB000095000002021910000001.

    Y. Sasaki and C. Horie, Phys. Rev. B 47, 3811 (1993).

    G. Kartopu, A. V. Sapelkin, V. A. Karavanskii, U. Serincan, and R. Turan, J. Appl. Phys. 103, 113518 (2008)JAPIAU000103000011113518000001.

    A. Karmous, I. Berbezier, and A. Ronda, Phys. Rev. B 73, 075323 (2006).

    C. W. Yuan, D. O. Yi, I. D. Sharp, S. J. Shin, C. Y. Liao, J. Guzman, J. W. Ager III, E. E. Haller, and D. C. Chrzan, Phys. Rev. Lett. 102, 146101 (2009).

    S. S. Coffee and J. G. Ekerdt, J. Appl. Phys. 102, 114912 (2007)JAPIAU000102000011114912000001.

    A. Molle, N. K. Bhuiyan, T. Grazia, and M. Fanciulli, Appl. Phys. Lett. 89, 083504 (2006)APPLAB000089000008083504000001.

    M. Backman, F. Djurabekova, O. H. Pakarinen, K. Nordlund, L. L. Araujo, and M. C. Ridgway, Phys. Rev. B 80, 144109 (2009).

    M. Buljan, U. V. Desnia, M. Ivanda, N. Radic, P. Dubcek, G. Drazic, K. Salamon, S. Bernstorff, and V. Holy, Phys. Rev. B 79, 035310 (2009).

    M. Zschintzsch, N. M. Jeutter, J. Von Borany, M. Krause, and A. Mucklich, J. Appl. Phys. 107, 034306 (2010)JAPIAU000107000003034306000001.


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