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Applied Physics Letters / Volume 96 / Issue 26 / STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER

Appl. Phys. Lett. 96, 261904 (2010); http://dx.doi.org/10.1063/1.3457995 (3 pages)

Composition measurement of the Ni-silicide transient phase by atom probe tomography

K. Hoummada, I. Blum, D. Mangelinck, and A. Portavoce

Aix-Marseille University, IM2NP, CNRS (UMR 6242), Faculté de Saint-Jérôme, Case 142, F-13397 Marseille Cedex, France

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(Received 27 April 2010; accepted 28 May 2010; published online 29 June 2010)

The transient phase observed during the reaction of a Ni(Pt) alloy with a (001)Si substrate is studied using in situ x-ray diffraction and atom probe tomography microscopy. This transient phase exhibits a diffraction peak at 47°, and is found to have a uniform composition corresponding to Ni0.6Si0.4. During the reaction, it is located between a δ-Ni2Si layer and a thin (nanocrystalline or amorphous) NiSi layer in contact with Si. The Pt atoms are found in the δ-Ni2Si grain boundaries, while they have not been detected in the NiSi layer.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

chemical analysis, grain boundaries, nanostructured materials, nickel alloys, silicon alloys, thin films, tomography, X-ray diffraction

PACS

  • 68.35.Fx

    Diffusion; interface formation

  • 82.80.-d

    Chemical analysis and related physical methods of analysis

  • 61.72.Mm

    Grain and twin boundaries

  • 68.55.at

    Other materials

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3457995

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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    K. Hoummada, C. Perrin-Pellegrino, and D. Mangelinck, J. Appl. Phys. 106, 063511 (2009)JAPIAU000106000006063508000001.

    K. Hoummada, E. Cadel, D. Mangelinck, C. Perrin-Pellegrino, D. Blavette, and B. Deconihout, Appl. Phys. Lett. 89, 181905 (2006)APPLAB000089000018181905000001.

    T. F. Kelly and M. K. Miller, Rev. Sci. Instrum. 78, 031101 (2007)RSINAK000078000003031101000001.

    D. Mangelinck, K. Hoummada, and I. Blum, Appl. Phys. Lett. 95, 181902 (2009)APPLAB000095000018181902000001.


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