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Appl. Phys. Lett. 96, 263101 (2010); http://dx.doi.org/10.1063/1.3458692 (3 pages)

Adiabatic embedment of nanomechanical resonators in photonic microring cavities

Chi Xiong1, Wolfram Pernice1, Mo Li1, Michael Rooks2, and Hong X. Tang1

1Department of Electrical Engineering, Yale University, New Haven, Connecticut 06520, USA
2Yale Institute of Nanoscience and Quantum Engineering, 15 Prospect St, New Haven, Connecticut 06520, USA

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(Received 17 May 2010; accepted 8 June 2010; published online 28 June 2010)

We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of mechanical beam.

© 2010 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 42.79.-e

    Optical elements, devices, and systems

  • 07.10.Cm

    Micromechanical devices and systems

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

For access to fully linked references, you need to log in.
    R. M. Briggs, M. Shearn, A. Scherer, and H. A. Atwater, Appl. Phys. Lett. 94, 021106 (2009)APPLAB000094000002021106000001.

    H. Guckel, T. Randazzo, and D. W. Burns, J. Appl. Phys. 57, 1671 (1985)JAPIAU000057000005001671000001.


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