Nanoscale space charge generation in local oxidation nanolithography

Chiesa, Marco; Garcia, Ricardo

doi:doi:10.1063/1.3459976

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Ion-sculpting of nanopores in amorphous metals, semiconductors, and insulators

We report the closure of nanopores to single-digit nanometer dimensions by ion sculpting in a range of amorphous materials including insulators (SiO2 and SiN), semiconductors (a-Si), and metallic glasses (Pd80Si20)—the building blocks of a single-digit nanometer electronic device. Ion irradiation of nanopores in crystalline materials (Pt and Ag) does not cause nanopore closure. Ion irradiation of c-Si pores below 100 °C and above 600 °C, straddling the amorphous-crystalline dynamic transition t...

Phonon wave-packet interference and phonon tunneling based energy transport across nanostructured thin films

The molecular dynamics based phonon wave-packet technique is used to study phonon transport across mass-mismatched fcc thin films. Transport behavior of normally incident longitudinal acoustic phonon wave packets with wave vectors ranging in magnitude from 2% to 50% of the 〈100〉 first Brillouin zone boundary is examined as a function of thin film thickness when the phonon mean free path exceeds film thickness. The results indicate that for thin film to bulk solid mass ratios up to a factor of 6...

We have measured the surface potential and the space charge generated during the first stages of atomic force microscopy field-induced oxidation. Space charge densities are about 10¹⁷ cm⁻³ for oxidation times below 10 ms. In a dry atmosphere, the surface potential is negative. However, in humid air the surface potential could be either positive or negative. This effect is attributed to a screening effect of the water molecules. These results explain and support the use of local oxidation patterns as templates for building molecular architectures. They also establish the space charge build up as an intrinsic feature in local oxidation experiments.

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KEYWORDS and PACS

Keywords

atomic force microscopy, nanolithography, oxidation, space charge, surface potential

PACS

81.16.Nd

Micro- and nanolithography
81.16.Ta

Atom manipulation
77.22.Jp

Dielectric breakdown and space-charge effects

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http://dx.doi.org/10.1063/1.3459976

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0003-6951 (print)

1077-3118 (online)

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American Institute of Physics

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