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Appl. Phys. Lett. 96, 263508 (2010); http://dx.doi.org/10.1063/1.3457872 (3 pages)

Nonequilibrium carrier distribution in semiconductor photodetectors: Surface leakage channel under illumination

Hao Yin, Tian-xin Li, Wei-da Hu, Wen-juan Wang, Ning Li, Xiao-shuang Chen, and Wei Lu

National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 YuTian Road, Shanghai 200083, People’s Republic of China

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(Received 4 February 2010; accepted 7 June 2010; published online 29 June 2010)

The nonequilibrium carrier distribution in an InGaAs/InP avalanche photodiode under light illumination is obtained by cross-sectional scanning capacitance microscopy combined with numerical simulation. The sheet density of negative surface charge is determined to be 1.85×1010 cm−2 on the native-oxidized InGaAs (110) face. This surface charge is found responsible for the accumulation of minority holes, which leads to an inversion layer at the sidewall surface of device in the absorption region under illumination exceeding 0.1 mW/cm2. The inversion depth increases up to 200 nm along with the enhancement of excitation intensity. This work suggests that a surface leakage channel may form in semiconductor photodetectors through detection light excitation.

© 2010 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 85.60.Gz

    Photodetectors (including infrared and CCD detectors)

  • 85.60.Dw

    Photodiodes; phototransistors; photoresistors

  • 78.66.Fd

    III-V semiconductors

  • 73.40.Kp

    III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions

  • 72.20.Jv

    Charge carriers: generation, recombination, lifetime, and trapping

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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