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Appl. Phys. Lett. 96, 091102 (2010); http://dx.doi.org/10.1063/1.3332591 (3 pages)

Hard x-ray nanobeam characterization by coherent diffraction microscopy

A. Schropp1, P. Boye1, J. M. Feldkamp1, R. Hoppe1, J. Patommel1, D. Samberg1, S. Stephan1, K. Giewekemeyer2, R. N. Wilke2, T. Salditt2, J. Gulden3, A. P. Mancuso3, I. A. Vartanyants3, E. Weckert3, S. Schöder4, M. Burghammer4, and C. G. Schroer1

1Institute of Structural Physics, Technische Universität Dresden, D-01062 Dresden, Germany
2Institute of X-Ray Physics, Universität Göttingen, D-37077 Göttingen, Germany
3Deutsches Elektronen Synchrotron DESY, D-22607 Hamburg, Germany
4European Synchrotron Radiation Facility (ESRF), BP 220, F-38043 Grenoble Cedex, France

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(Received 22 December 2009; accepted 11 January 2010; published online 1 March 2010)

We have carried out a ptychographic scanning coherent diffraction imaging experiment on a test object in order to characterize the hard x-ray nanobeam in a scanning x-ray microscope. In addition to a high resolution image of the test object, a detailed quantitative picture of the complex wave field in the nanofocus is obtained with high spatial resolution and dynamic range. Both are the result of high statistics due to the large number of diffraction patterns. The method yields a complete description of the focus, is robust against inaccuracies in sample positioning, and requires no particular shape or prior knowledge of the test object.

© 2010 American Institute of Physics

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0003-6951 (print)  
1077-3118 (online)

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