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Applied Physics Letters / Volume 96 / Issue 9 / LASERS, OPTICS, AND OPTOELECTRONICS

Appl. Phys. Lett. 96, 091106 (2010); http://dx.doi.org/10.1063/1.3341201 (3 pages)

Ultrathin Cu-Ti bilayer transparent conductors with enhanced figure-of-merit and stability

D. S. Ghosh1, T. L. Chen1, and V. Pruneri1,2

1Institut de Ciències Fotòniques (ICFO), Mediterranean Technology Park, Castelldefels, 08860 Barcelona, Spain
2Institució Catalana de Recerca i Estudis Avançats (ICREA), 08010 Barcelona, Spain

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(Received 27 January 2010; accepted 10 February 2010; published online 5 March 2010)

We propose a transparent conductor (TC) structure based on the combination of ultrathin Cu and Ti films. The conductive Cu layer becomes continuous, i.e., it reaches the percolation threshold, for thicknesses in the range of 5.5–6.5 nm. However, without any adequate countermeasure, such an ultrathin layer would unavoidably oxidize even at ambient conditions. In this letter, we show that Ti capping layer in situ treated by oxygen plasma can protect the underlying Cu ultrathin layer and enhances its figure-of-merit. The improved optical properties can be attributed to multiple reflection and refraction effects in Cu-Ti bilayer system. The obtained Cu-Ti bilayer ultrathin films show transparency of 86% at wavelengths around 630 nm and sheet resistance of 16 Ω/sq, and exhibit excellent stability, as demonstrated by the fact that their properties do not significantly change after thermal treatment up to 120 °C for a dwell time of 45 min in ambient atmosphere.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

conductors (electric), copper alloys, metallic thin films, multilayers, optical properties, titanium alloys

PACS

  • 78.66.Bz

    Metals and metallic alloys

  • 78.67.Pt

    Multilayers; superlattices; photonic structures; metamaterials

  • 68.65.Ac

    Multilayers

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3341201

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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