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Applied Physics Letters / Volume 96 / Issue 9 / DEVICE PHYSICS

Appl. Phys. Lett. 96, 093502 (2010); http://dx.doi.org/10.1063/1.3304168 (3 pages)

Low-loss superconducting resonant circuits using vacuum-gap-based microwave components

Katarina Cicak1, Dale Li1, Joshua A. Strong1,2, Michael S. Allman1,2, Fabio Altomare1, Adam J. Sirois1,2, Jed D. Whittaker1,2, John D. Teufel1, and Raymond W. Simmonds1

1National Institute of Standards and Technology, Boulder, Colorado 80305, USA
2University of Colorado, Boulder, Colorado 80309, USA

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(Received 26 October 2009; accepted 1 January 2010; published online 4 March 2010)

We have produced high-quality complex microwave circuits, such as multiplexed resonators and superconducting phase qubits, using a “vacuum-gap” technology that eliminates lossy dielectric materials. We have improved our design and fabrication strategy beyond our earlier work, leading to increased yield, enabling the realization of these complex circuits. We incorporate both novel vacuum-gap wiring crossovers for gradiometric inductors and vacuum-gap capacitors (VGC) on chip to produce resonant circuits that have large internal quality factors (30 000<QI<165 000) at 50 mK, outperforming most dielectric-filled devices. Resonators with VGCs as large as 180 pF confirm single mode behavior of our lumped-element components.

© 2010 U.S. Government

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KEYWORDS and PACS

Keywords

capacitors, gravimeters, inductors, microwave circuits, superconducting resonators

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3304168

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef U.S. Government

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