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Appl. Phys. Lett. 97, 143115 (2010); http://dx.doi.org/10.1063/1.3496000 (3 pages)

Fracture toughness, hardness, and Young’s modulus of tantalum nanocrystalline films

G. Guisbiers1, E. Herth2, L. Buchaillot2, and T. Pardoen1

1Institute of Mechanics, Materials, and Civil Engineering, UCL, Place Sainte Barbe 2, B-1348 Louvain-la-Neuve, Belgium
2CNRS-UMR8520, IEMN, Scientific City, Avenue Henri Poincaré BP60069, F-59652 Villeneuve d’Ascq, France

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(Received 26 July 2010; accepted 10 September 2010; published online 7 October 2010)

The fracture toughness, hardness, and Young’s modulus of tantalum thin films are investigated based on nanoindentation measurements. A lower estimate of the fracture toughness of a 100 nm tantalum film is 0.28±0.07 MPa m1/2. The hardness increases when reducing the film thickness whereas Young’s modulus decreases slightly. More precisely, the hardness of the 100 nm thick film is four times higher than the bulk behavior. A simple theoretical model, based on the connection between Young’s modulus and melting temperature, predicts an inverse grain size variation in Young’s modulus confirmed by experiments.

© 2010 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 81.40.Np

    Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure

  • 62.20.mm

    Fracture

  • 81.07.Bc

    Nanocrystalline materials

  • 68.60.Bs

    Mechanical and acoustical properties

  • 61.46.Hk

    Nanocrystals

  • 81.40.Jj

    Elasticity and anelasticity, stress-strain relations

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

For access to fully linked references, you need to log in.
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