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Applied Physics Letters / Volume 97 / Issue 17 / STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER

Appl. Phys. Lett. 97, 171901 (2010); http://dx.doi.org/10.1063/1.3502486 (3 pages)

Surface effects on the dynamic behavior of nanosized thin film resonator

Jinbok Choi1, Maenghyo Cho2, and Wonbae Kim2

1Automotive Steel Applications Research Group, Technical Research Laboratories, POSCO, 699 Gumho-dong, Gwangyanhg-si, Jeollanam-do 545–090, Republic of Korea
2School of Mechanical and Aerospace Engineering, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Republic of Korea

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(Received 16 May 2010; accepted 25 September 2010; published online 25 October 2010)

We present a continuum-based sequential multiscale dynamic model that can consider the unique dynamic behavior of a thin film with a nanosized thickness dimension. It is known that surface effects become dominant when the thickness of a thin film is scaled down to several nanometers because of the high surface-to-volume ratio of the thin film. Therefore, the natural frequencies and mode shapes of nanoelectromechanical system resonators can be significantly affected by surface effects. A finite element model considering surface effects of a nanosized thin film resonator is developed, and dynamic behavior is predicted using the proposed model by overcoming limitations of molecular dynamics simulations.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

finite element analysis, nanoelectromechanical devices, nanostructured materials, resonators, thin films

PACS

  • 07.10.Cm

    Micromechanical devices and systems

  • 85.35.-p

    Nanoelectronic devices

  • 68.60.-p

    Physical properties of thin films, nonelectronic

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3502486

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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