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Applied Physics Letters / Volume 97 / Issue 17 / STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER

Appl. Phys. Lett. 97, 171909 (2010); http://dx.doi.org/10.1063/1.3503972 (3 pages)

Direct growth of few-layer graphene on 6H-SiC and 3C-SiC/Si via propane chemical vapor deposition

A. Michon1, S. Vézian1, A. Ouerghi2, M. Zielinski3, T. Chassagne3, and M. Portail1

1CNRS-CRHEA, Rue Bernard Gregory, 06560 Valbonne, France
2CNRS-LPN, Route de Nozay, 91460 Marcoussis, France
3NOVASiC, Savoie Technolac, Arche Bat 4, BP267, 73375 Le Bourget du Lac, France

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(Received 14 July 2010; accepted 29 September 2010; published online 28 October 2010)

We propose to grow graphene on SiC by a direct carbon feeding through propane flow in a chemical vapor deposition reactor. X-ray photoemission and low energy electron diffraction show that propane allows to grow few-layer graphene (FLG) on 6H-SiC(0001). Surprisingly, FLG grown on (0001) face presents a rotational disorder similar to that observed for FLG obtained by annealing on (000–1) face. Thanks to a reduced growth temperature with respect to the classical SiC annealing method, we have also grown FLG/3C-SiC/Si(111) in a single growth sequence. This opens the way for large-scale production of graphene-based devices on silicon substrate.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

annealing, chemical vapour deposition, graphene, low energy electron diffraction, X-ray photoelectron spectra

PACS

  • 81.15.Gh

    Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)

  • 81.40.Gh

    Other heat and thermomechanical treatments

  • 79.60.-i

    Photoemission and photoelectron spectra

  • 82.80.Pv

    Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)

  • 61.48.Gh

    Structure of graphene

  • 73.61.Wp

    Fullerenes and related materials

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3503972

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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