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Applied Physics Letters / Volume 97 / Issue 21 / LASERS, OPTICS, AND OPTOELECTRONICS

Appl. Phys. Lett. 97, 211105 (2010); http://dx.doi.org/10.1063/1.3517493 (3 pages)

Direct laser writing of whispering gallery microcavities by two-photon polymerization

Zhao-Pei Liu, Yan Li, Yun-Feng Xiao, Bei-Bei Li, Xue-Feng Jiang, Yi Qin, Xiao-Bo Feng, Hong Yang, and Qihuang Gong

Department of Physics and State Key Laboratory for Mesoscopic Physics, Peking University, Beijing 100871, People’s Republic of China

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(Received 3 August 2010; accepted 28 October 2010; published online 22 November 2010)

We demonstrate that high-Q polymer whispering gallery microcavities can be directly written by the two-photon polymerization of zirconium/silicon hybrid sol-gel, benefiting from the high spatial resolution and three-dimensional nature of this direct laser writing technique. The quality factors of the fabricated whispering gallery microcavities are up to 1.48×105 limited by the material absorption. The surface roughness is less than 12 nm. This opens the way to fabricate intricate three-dimensional microcavities for the fundamental and applied physics research based on optical resonators.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

laser beam machining, micro-optics, optical fabrication, optical polymers, optical resonators, polymerisation, silicon, sol-gel processing, whispering gallery modes, zirconium

PACS

  • 42.79.-e

    Optical elements, devices, and systems

  • 42.70.Jk

    Polymers and organics

  • 81.10.Dn

    Growth from solutions

  • 81.10.Fq

    Growth from melts; zone melting and refining

  • 81.15.Lm

    Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)

  • 42.82.Cr

    Fabrication techniques; lithography, pattern transfer

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3517493

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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