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6 Dec 2010

Volume 97, Issue 23, Articles (23xxxx)

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Appl. Phys. Lett. 97, 233101 (2010); http://dx.doi.org/10.1063/1.3523252 (3 pages)

Hoonkyung Lee, Marvin L. Cohen, and Steven G. Louie
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Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa, and Fumihiro Koike

Appl. Phys. Lett. 97, 231501 (2010); http://dx.doi.org/10.1063/1.3524494 (3 pages) | Cited 5 times

Online Publication Date: 6 December 2010

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The emission spectrum and conversion efficiency of laser-produced terbium plasmas are theoretically investigated on the basis of computational atomic data. The theoretically calculated spectrum reproduces the main peak of observed spectrum at λ = 6.5 nm, which originates from 4d−4f transitions of near palladiumlike ions (Tb19+). A simple model of the isothermal expansion of terbium plasma suggests that efficient emission can be achieved by pumping the plasma with a laser pulse at an intensity of approximately one order of magnitude greater than that used with tin sources at λ = 13.5 nm.
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52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.65.-y Plasma simulation
52.50.Dg Plasma sources
42.72.Bj Visible and ultraviolet sources

Interchannel optical coupling within arrays of linear microplasmas generated in 25–200μm wide glass channels

S. H. Sung, I. C. Hwang, S.-J. Park, and J. G. Eden

Appl. Phys. Lett. 97, 231502 (2010); http://dx.doi.org/10.1063/1.3505498 (3 pages) | Cited 2 times

Online Publication Date: 9 December 2010

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Axially uniform microcavity plasmas with widths of 25–200 μm and aspect ratios as high as 500 have been generated in glass microchannels. Sealed in cavities 2.5 cm in length and having a cross-sectional area of 2.5×102–104 μm2, these microplasmas operate in the abnormal glow regime with neutral particle temperatures of 365–420 K when the rare gas pressure is 200–700 Torr. In arrays as large as ten parallel microchannel plasmas, evidence of optical coupling among the channels is observed in the form of strongly enhanced atomic emission which is attributed to electron heating driven by the resonant absorption of scattered radiation.
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52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.40.Db Electromagnetic (nonlaser) radiation interactions with plasma
52.50.Dg Plasma sources
52.80.Hc Glow; corona

Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

Takamitsu Otsuka, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan

Appl. Phys. Lett. 97, 231503 (2010); http://dx.doi.org/10.1063/1.3526383 (3 pages) | Cited 10 times

Online Publication Date: 10 December 2010

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We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6×1012 W/cm2 at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high-Z targets.
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52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.50.Dg Plasma sources
42.72.Bj Visible and ultraviolet sources
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
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